Metal Seal/Rubber Seal Series VQ Body Ported VVQ1000-1A-3Electrical entry F1: For F kit P1: P, G, T, S kit for 1 to 12 stations/Double wiring P2: G, S kit for 13 to 16 stations/Double wiring P3: G, S kit for 1 to 16 stations/Single wiring L0: L0 kit L1: L1 kit L2: L2 kit Lead wire assembly for extensions is attached. Note) Note) Note) Note) : Stations (1 to 16)
thread ridge shape is compatible with the G thread standard (JIS B0202), but other shapes are not conforming to ISO16030 and ISO1179. 1 output, without analog output, Diaphragm (18 rotation setting), Solid state(10 to 26 VDC) (ZSM1) 1 output, without analog output, Diaphragm (18 rotation setting), Reed (AC/DC 100 VAC)(ZSM1) Supply valve/Release valve combination Manual override J K A B P3
Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3
Without pressure sensor Note 1) PSE541 P1 PSE541A P1A PSE543 P3 PSE543A P3A Electrical entry KQ2P-04 B L L plug connector, with 0.3 m lead wire, with light/surge voltage suppressor Note 1) One-touch fittings are plugged when the pressure sensor is mounted. Note 2) This pressure switch detects pressure and converts the data into analog output.
Latching type is applicable only to the ejector nozzle sizes 0.3 and 0.4 Table 1 1 Compact Vacuum Unit Series ZB Pressure Sensor/Vacuum Pressure Switch Specifications Type Symbol Pressure range psi (kPa) Specifications Without pressure sensor/vacuum pressure switch Nil P1 P3 EA EAM EAP EB EBM EBP FA FAM FAP FB FBM FBP Output: 1 to 5 V, accuracy: 2% F.S. or less Note 7) Output: 1 to 5 V, accuracy
Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13
SG Connector location P3: Not used for the maintenance purpose port D-sub9 (Male receptacle) P2: Serial RS-485 D-sub9 (Female receptacle) P1: Contact input/output D-sub25 (Female receptacle) Power cable entry E S O L C SMC N E P O Rear side 93 Series HRZ Operation Panel Display Description No.
thread ridge shape is compatible with the G thread standard (JIS B0202), but other shapes are not conforming to ISO16030 and ISO1179. 1 output, without analog output, Diaphragm (18 rotation setting), Solid state(10 to 26 VDC) (ZSM1) 1 output, without analog output, Diaphragm (18 rotation setting), Reed (AC/DC 100 VAC)(ZSM1) Supply valve/Release valve combination Manual override J K A B P3
Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 19 (3/4" or ø19), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: P3 (Direction 3), Option 1: None, Option 2: J (for High Temperature)
Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3)
Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3), Material: Standard, Option: 1 (With Flow Rate Adjustment)
Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3), Material: Standard, Option: 3 (With Flow Rate Adjustment & By-Pass)
Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3)
Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: P3 (Position 3), Material: Standard, Option: 3 (With Flow Rate Adjustment & By-Pass)
Type: 4 [High Flow, 500 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P3 (NPN Open Collector, 2 Outputs), Regulator: R (With Regulator), ON/OFF Valve: V1 (With Air Operated Flow Adjuster), Restrictor: Without Restrictor, Filter: F (With Filter)
Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 1 (One-touch Fitting: Size 3=ø10, Size 4=ø12), Digital Flow Switch: P3 (NPN Open Collector, 2 Outputs), Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: V (With Air Operated), Restrictor: S (With Restrictor), Filter: F (With Filter)
s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed
s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes
s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed
s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed