5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Valve stations F: D-sub connector P: Flat cable connector (26 pins) Note Note Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Note 1) Double wiring specification Double wiring specification ... ... ... ... ... 12 13 12 13 Connector mounting position 12 stations 12 stations 13 stations 13 stations Symbol D Mounting position Specified wiring Note 2) Specified wiring (up to 25 solenoids

Thermo-chiller/Rack Mount Type

For pipe thread type F , a G thread conversion fitting set is included.

High-Precision Digital Pressure Switch

DC () 13 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Internal Circuits and Wiring Examples ZSE20A(F) ZSE20B(F) ISE20A ISE20B Output specification ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details -X NPN (2 outputs) + Copy function -Y PNP (2 outputs) + Copy function Brown DC (+) Brown DC (+) Load Gray Copy terminal1 Gray

KJ

(mm) Note) Connection thread Rc 3.2 Mounting T (M) Weight (g) L1 M L2 Model hole Nylon Urethane 2.9 Mounting plate thickness 7 mm or less 1 4 KQ2E23-02 13 M12 x 1 3.4 14 31.5 15 13 15.5 17 14 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 Connection thread 4 M12 x 1 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 KQ2E04-02 17 15 35 Applicable tubing KQ2E06-01 28 11 25 40 17 KQ2E06-02 15 6

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

Guide Cylinder/Compact Type Series MGC

View A-A (mm) Bore size (mm) Stroke range (mm) A AA AB AC AD AE AF AP B C D E F G H 20 25 32 40 50 84 62 90 5.6 75, 100, 125, 150, 200 12 13 15.5 25 M5 x 0.8 depth 10 22 106 24 45 9.5 depth 6 M6 x 1 depth 10 M6 x 1 depth 12 89 16 13 16.5 65 30 27 120 26.5 45 103 6.8 11 depth 8 M8 x 1.25 depth 14 M6 x 1 depth 12 94 16 13 16.5 70 35 32 135 26.5 50 118 6.8 11 depth 8 M8 x 1.25 depth 14 75, 100

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 258-9200-www.stevenengineering.com 14 (2, 4 port) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13 (2 port) B A B A 50 62 50 62 38 14 38 12 14 12 Manual override Manual override P R1 R2 P

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Compact Cylinder Series CQS

14 11 10.5 16 18 1 0.5 6 8 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 11 10.5 16 18 4.5 [2] 10 [7.5] 12 [9.5] Anti-lateral Load Type 6 5.5 9 10 19.5 21.5 25 27 7 6.5 2.5 0.5 12 16 20 25 1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5

LEH_C

LEHZ-OM00301 / / LEH Series LEHZ(J),LEHF,LEHS Z (2 LEHZ Seres LEHZJ Seres F (2 LEHF Seres S (3 LEHS Seres <> LEC Series /LEC6 .3 1./.5 1.1 . 5 1.2 . 6 1.3 . 8 2./LEHZ .10 2.1 LEHZ () . 10 2.1.1 . 10 2.1.2 . 11 2.1.3 . 12 2.2 LEHZJ () . 13 2.2.1 . 13 2.2.2 . 14 2.2.3 . 15 2.2.4 . 16 3./LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

HRX-OM-X071

Display at 0 to F screen Serial communication status COMMSTUS piping). 3 For 200V type only.

NCM

(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.

CG5-S

M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17

Smooth Cylinder

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQD AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm DIN Rail Mounting Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D.

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031