JXCx-OMT0061CN

->/P.32 10.1 ->/P.15 3.4 ->/P.47 11. 5 (CN1: EMG ->/P.12 3. ) SV1.00 INP ON (INP INP OFF PLC ) ->/P.32 10.1 ->/P.12 3. PLC (PLC) 15ms30ms ->/P.55 12.4 91 - () ->/P.47 11. ->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MK

MK225-F MK2G20 MK2G25 0 0.043 0 0.043 13 15 39 42 60 64 0.1 25.5 28 0.15 48 52 0.15 0.1 Auto switch Minimum bending radius of lead wire 10 In the case of connector 11 D Note 2) 2-M5 x 0.8 M8 x 1.25 Effective thread depth 11 E (2) M6 x 1 2-5.5 through 2 x 2-9 counterbore depth 7 J + Clamp stroke depth 3 I + 2 x Clamp stroke Through-hole/Both Ends Tapped Common (Standard) (mm) Model F G

Mist Separator Regulator

Options 11 6. Structural Drawing and Replacement Parts 12-13 7. Bowl Assembly Specifications 14-21 8. Assembly of Optional Parts 22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-37 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-30 11-3. Element Replacement 31-32 11-4. Valve Assembly Replacement 33-34 11-5.

Ｍ icro Mist Separator Regulator

[11.

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force

Series IDG

type Float type With drain guide Port size A B C D E F G H J K L M N Q Model P 224 45 11 275 59 14 5.5 133 158 188 228.5 78 179.5 8.5 185 244 269 365 87 30 24 201.5 IDG3V, 3HV, 5V, 5HV IDG10V, 10HV 1/8, 1/4 263.5 7 92.5 222.5 11 102 41 35 IDG20V, 20HV 1/4, 3/8 305 IDG30V, 30HV 315 IDG50V, 50HV 161 409 464 544 121 50 40 IDG60LV, 60SV 77 18 9 274 280 112 315 13 IDG75LV, 75SV 3/8, 1/2 327 173

Electric Actuators

Table displacement due to pitch moment load (marked with the arrow) Table displacement due to yaw moment load (marked with the arrow) Table displacement due to roll moment load (marked with A) F A F F LEPS6 LEPS6 LEPS6 0.30 0.30 0.10 0.25 0.25 Displacement [mm] Displacement [mm] Displacement [mm] 0.08 0.20 0.20 0.06 LEPS6m-50 LEPS6m-50 0.15 0.15 0.04 0.10 0.10 LEPS6m-25 0.02 LEPS6m-25 0.05

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

High Power Cylinder Series RHC

NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40 N NE NA NB NF ND NN P S WH

Direct Solenoid

I E = 48'Solsnoid Leads (24'STD) I e = Mounting Bs (AXT 33&11) II I F..tur"" D = Recessed non-locking manual operator F = Becessed non-locking manual operator and etectricat indicator light.' K = Recessed locking manual operator J = Recessed locking manual operator and electrical indicator light.'

39

CKZ-50A007 CKZ-50A008 CKZ-50A009 NAAMS code ACA201M ACA202M ACA203M NAAMS code ACA211M ACA212M ACA213M Straight-Machined 25 mm Offset-Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E F G F 200.03 10 G 200.03 10 300.025 300.025 11 through 11 through H 300.025 300.025 250.05 I M61.0 H M61.0 150.03 150.03 I R45 6.5 500.05 6.5 18 30 3 10 10 3 18 R6 R6 R25 R25 19

REC

Rear flange: G 39 50 56 61 0.3 Foot: L L CE1 10 30 38 43 47 0.5 W W W CE2 F 5 24 31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W

Rotary Actuator

Size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA CA CB Valve dimensions Key dimensionsNote) S SB SC SD SE S VH VJ VK VL b l 50 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 9.5 7.5 39.5 4 21 8 5 0 0.030 25 63 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 11 8 39.5 11 21 8 6

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

REC

Dimensions Basic style: RECB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H2 2-RcP Width across flats B2 Width across flats B1 2-NN G G H1 Standard port Pluged (M5 x 0.8) I 2-Eh8 D MM AL K A N N F lNA S + Stroke H F ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

Digital Gap Checker ( compatible)

ON (500 to 351) (350 to 301) (300 to 251) (250 to 201) ISA3-F 3000 or less ISA3-G (3000 to 1751) X+1500 Process X+1250 X+1000 (1750 to 1501) (1500 to 1251) (1250 to 1001) data ISA3-H 2500 or less (2500 to 1751) Distance type Level 6 Level 7 Level 8 Level 9 Weight ISA-F X+15 X+10 X+5 X (5 to 0) 5 (20 to 16) (15 to 11) (10 to 6) ISA3-G X+75 X+50 X+25 X Display (25 to 0) 25 (100 to 76) (75