OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

AMR3000 to 6000

AMR5 00-04 to 06 AMR6 00-10 AR425 to 935 Adapter assembly port size (2 pcs.)

ARX Series

ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Manifold Specifications

Rc Nil G F VP4 20 20 stations 4(A), 2(B) port N NPTF T NPT Rc 1/4 3/5(R) port Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port.

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

HRX-OM-R039

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

LC-OM089xx

Max. 1.3A Max. 2.3A L C 3 F 2 1 2 5 [] [] [] (1)(2) Check voltage between DC(+) and DC(-) Supply 24VDC 10%.

EXxx-OMA1018_Eng

(Recommended torque: 0.9 10% Nm) Summary of Product parts LATVIA (371) 781 77 00 Environment Dzelzavas str. 120g, Riga, LV-1021, Latvia Warning This device complies with Part 15 of the FCC Rules.

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

AC Servo Motor Driver (Pulse input type/Positioning type)

The station should be set to 00. Be sure to change parameter [PC40] to [0]. The default value of parameter [PC40] is [0]. When using LECSA for the first time, please use the default parameter for [PC40] as [0]. Please select servo amplifier connection USB as the communication device. Click OK.

RS2H-OM0045P

. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.(RS2H50) -1-2.(RS2H63 -1-3.

VFRA3000

-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold.

to Cart SMC 18X15X1.5 o-ring, 18x15x1.5, VFS2000 SOL VALVE 4/5 PORT*** $3.81 + Add to Quote Add To Cart Add to Cart SMC ARBF2000-00

AU

JIS Symbol VY1 G 2 G 1 R 00 02 AU PPA Construction Lube unit AL Body Diaphragm assembly Valve assembly Sight dome Plug assembly of supplying oil Body size (Standard) Gasket for valve guide Thread type Nil N F 1 8 Damper 1 2 3 Rc NPT G 4 1 O-ring 3 8 Auto-drain specifications Description Component Parts AU100 type Body Material Zinc die-casted, Aluminum die-casted No.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

Compact Proportional Solenoid Valve Series PVQ

= " 9 00 5 0 ' , > 5 0 77 $" 7 9 00 0 ++ Compact Proportional Solenoid Valve Series PVQ10 Flow Characteristics PVQ10 /% PVQ10 /%0 # # P = 0.45 MPa P = 0.7 MPa ! ! P = 0.35 MPa P = 0.5 MPa l1 l1 & & P = 0.25 MPa P = 0.35 MPa 0 0 ARJ P = 0.15 MPa P = 0.2 MPa AR425 to 935 ( ( " " AMR % % % "% (% (% 0% % !% 0% -% &% "%% !% "(% #% "0% -% "!% .% "-% "%% (%% % % % "% (% (% 0% % !

AC Servo Motor Driver (Pulse input type)

The station should be set to 00. The setting should match the setting of parameter [PC20]. The default value of parameter [PC20] is [0]. When using LECSB for the first time please use the default value for parameter [PC20] which is set to [0], and please set [Station] to [00] Please select servo amplifier connection USB as the communication device. Click OK.