Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

CRB2/CRBU2/CRB1

F = mg Mass m Movement I: Inertial moment Refer to page 100. Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .

Floating Joint

nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40

Modular Type Filter Regulator Series AW

u u Drain Drain Drain Parts list Material No.

VS 8-2/VS 8-4

9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

E-ITV-STD-RF-A

Fl ow of t he set t i ng PO W ER O N REFER TO P8 U N LO CK KEYS REFER TO P911 REFER TO P8 REFER TO P11 REFER TO P1316 LO CK KEYS RESET SETTI N G O F PRESET PRESS. D ETAI L SETTI N G SETTI N G O F M I N . PRESS. G AI N SETTI N G O F M AX. PRESS. SEN SI TI VI TY SETTI N G O F SW I TCH O U T.

Secondary Batteries

How to Order 90-ZPTSeries With buffer ZPT A8 U 06 K F 6 B5 90 Vacuum Equipment Mounting thread diameter/ Male thread Series compatible with secondary batteries A8 M8 x 1 90 Material restriction Vacuum entry port Pad diameter (mm) B5 M5 x 0.8 06 6 Buffer stroke Pad type 6 6 mm U Flat Buffer type K Non-rotating Material F Fluororubber *Specifications and dimensions for the 90-series are the

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

LEC-OM069xx

H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H /EXT1 *

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

VQ5000

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

REC

REC U/Front trunnion Width across flats B2 TDe9 -0.025 -0.061 Z 2-Rc(PT)P Width across flats B1 2-NN G Relieving port Relieving port M5 X 0.8 G H1 Standard port I MK/MK2 2-Eh8 TY D RSQ/RSG MM AL TT TX TZ RSH K A mNA N N F 40 CE1 S+Stroke H F ZZ+Stroke CE2 ML2B (mm) 32 ML1C H1 I K A AL B1 B2 D F G H MM E Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 5 33.5 5 18 15.5

LEC-OM071xx

H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H /EXT1 *

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

DeviceNet-E

U se a sof t cl ot h t o rem ove st ai ns. Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s docum ent descri bes t he general purpose product . Som e part s m ay di f f er f or part i cul ar speci al product s. Thi s m anual i s subj ect t o change w i t hout pri or not i ce. ITV2OM00080A 10