SQ1000/2000

SUP/EXH block Note 1) SSQ1000-PR-3-C8-(S) Back pressure check valve Note 2) SSQ1000-BP SUP block plate SSQ1000-B-P EXH block plate SSQ1000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B Note 4) C3 (N1) With 3.2 (1/8") One-touch fitting C4 (N3) With 4 (5/32") One-touch fitting C6 (N7) With 6 (1/4") One-touch fitting

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

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06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

MY1

Piston speed (mm/s) Piston speed (mm/s) 1.

Table of Contents

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Hydraulic

Symbol E F G H Nominal pressure 3.5MPa 7MPa 14MPa 14MPa Tube material Aluminum alloy Stainless steel Steel Stainless steel B C B-series rod size C-series rod size 32 is for B-series rod size only. CH2 H B B 50 100 CH D2 H B B 50 100 A53 With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

ISO Cylinder

C85NT08A-S C85NT10A-S C85NT10A-S C85NT20A-S C85NT25A-S Mounting nut C85NT08B-S C85NT08B-S C85NT10B-S C85NT10B-S C85NT20B-S C85NT20B-S C75 Standard C75 Double acting, Single rod C75W Double acting, Double rod C75 Single acting (Spring return/extend) Direct mount C75R Double acting, Single rod XC6A only Description Bore size [mm] 32 40 Rod end nut C76NT32A-S C76NT40A-S Mounting nut C76NT32B-S

0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

1

32 272 178 36 Stroke B Stroke A S + Stroke (A + B) ZZ + Stroke (A + B) 40 280 178 38 50 314 198 41 63 314 198 43 80 386 242 52 ZZ S Q L GC Bore size (mm) 100 386 242 52 40 282 180 66 12 42 GC 50 310 194 74 14 48 Stroke B Stroke A Series MB1 63 326 210 76 14 48 S + Stroke (A + B) 80 390 248 90 16 58 ZZ + Stroke (A + B) 100 414 270 98 18 60 Stroke B Stroke A ZZ + Stroke (A + B) S + Stroke

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

LJ1H

(B contact) 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQS CQM CQ2 RQ MU D-X 20Data 7-6-131 132 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod Series CQ2 32, 40, 50, 63, 80, 100 How to Order Without auto switch CQ2 B S 32 30 D C F9BW S CDQ2 B S 32 30 D C With auto switch Built-in magnet Number of auto switches Auto switch Mounting style Nil Without auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.

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Fixed 4% F .S.

PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb

PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb

PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb

PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb

PULSE VALVE, DUST COLLECTOR VALVE, O16, 2.48 lb