SMC Corporation of America
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W: 13 [kW] w Derive the heat generation amount from the power supply output.

Select the thermo-chiller considering the descriptions. q Upper limit of ambient temperature: Use the product in ambient temperature of the described value or lower at each altitude. w Cooling capacity coefficient: The product's cooling capacity will lower to one that multiplied by the described value at each altitude. HRS HRS 090 HRS 100/150 HRSH 090 HRSH 090 HRSH 2.

, 110, 200, 220 VAC (50/60 Hz) Allowable voltage fluctuation 10% of rated voltage Metal seal Coil insulation type Class B or equivalent 1 W DC (42 mA), 1.5 W DC (63 mA) (3), 0.5 W DC (21 mA) (4) 24 VDC 1 W DC (83 mA), 1.5 W DC (125 mA) (3), 0.5 W DC (42 mA) (4) 12 VDC 100 VAC Inrush 0.75 VA (7.5 mA), Holding 0.75 VA (7.5 mA) Power consumption (Current) Rubber seal 110 VAC Inrush 0.83 VA (

L3 A3 Load Mass: W Mr Graph (1) Static moment Dynamic moment MXY6 W My MXH W L3 A3 0.6 A2 L2 Rubber stopper screw Mr 0.5 Load mass W kg MXU L1 A1 Metal stopper screw Mp 0.4 W My MXS W 0.3 W 0.2 MXQ Mey Mep 0.1 We We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MXF MXW MXY8 Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4

to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Thus, it can be used in a Class 100 clean room.

Hs B A W 16, 20, 25 Approx. Hs W A A B CUJ CU 32 to 100 Approx.

= 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Weight: W [g] Stations: n Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VF5000).

F.S. = 100[kPa] 0[kPa] = 100[kPa] 3[%F.S.] = 100[kPa] X 0.03 = 3[kPa] Example: Time Failure predict output 1 ON OFF Time The display error induced by the temperature change can be as much as 3[kPa].

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

r w e e VXF26C<w w r r e q e q VXF26D<w r w e q e q Component Parts Component Parts No.

, 110, 200, 220 VAC (50/60 Hz) 3-position closed center 10% of rated voltage Allowable voltage fluctuation Coil insulation type Equivalent to Class B 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 3-position exhaust center 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) Inrush 1.0 VA (9 mA), Holding

, 110, 200, 220 VAC (50/60 Hz) 3-position closed center 10% of rated voltage Allowable voltage fluctuation Coil insulation type Equivalent to Class B 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC 3-position exhaust center 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) 100 VAC Power consumption (Current) Inrush 1.0 VA (9 mA), Holding