Precautions 1

2 M14 x 1.5 32 42.5 21.5 (mm) ZZ Z TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 D120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 -X 154 44.5 77 53 53 11 10 88 16 Individual -X 1571 Series CVM5 Head Side Trunnion Style (T) CVM5T Bore size Stroke Max. 21 Min. 18 Manual override Width across flats B2 Width across flats B1 Width across flats NA S + Stroke Z

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Microspeed Cylinder

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (

Round Type Hydraulic Cylinder

(mm) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21

Vacuum Unit

/ Complex exhaust) 40 40 100 Vacuum pressure [kPa] 30 30 80 Air consumption 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] Suction flow [L/min (ANR)] 19 Vacuum Unit ZK2mA Series The flow rate characteristics correspond to the standard supply pressure.

modular-press-e

Replacement Procedure is P.437 Construction AWG20 AWG30/40 Actuators Modular F.R.L.

Modular F.R.L. Pressure Control Equipment

Replacement Procedure is P.437 Construction AWG20 AWG30/40 Actuators Modular F.R.L.

90

01 1 L = 23 to 40 L = 510.5 For 1 station manifold to 10 For 10 stations manifold L rPort plug assembly VVQZ2000 CP tPort plug assembly 1.25 P=12.5 5.25 7.5 ZK2 MP1C6 A 35 25 5.5 yOne-touch fitting assembly VVQ1000 51A C8 L Dimension L = 12.5 x n + 10.5 No.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

ZVB40_E_

Layout of the valves and the piping are shown below. 8 8 8 8 Product number for single unit of the valve V1: VXJ1120-C8-5MO-X3 (for ionizer) V2: VXJ1120-C8-5MO-X3 (for additional air flow) V3: VXJ1120-C8-5MO-X3 (for dust collection, 2pcs.) V1 V2 V3 V3 8 fitting 8 8 8 fitting 3. Remove the cap nut that holds the valve to be replaced.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

Compact Manifold Regulator Series ARM5

PBT Material 30 40 0.5 g Mass 30 6.5 (R) 2 4.5 1 16 4 11 523 Series ARM10F Made to Order Specifications: Please contact SMC regarding detailed specifications, dimensions and delivery.

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Vacuum Regulator

Vacuum pump Conditions: Vacuum pump exhaust speed: 2500 l/min VAC side pressure: 101 kPa (At initial setting) Flow-rate Characteristics (Representative Value) Pressure Characteristics (Representative Value) IRV10-C08 (One-touch fitting 8) IRV10 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 57.0 90 0 20 40 60 80 100 120

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

NCA1

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1