0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

45 50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L

Electric Actuator Triple Axis P&P Unit

Remove the thin head screws (TP-M3 x 5, 8 pcs.) fixing the pulley cover using a hexagon wrench. Use a normal hexagon wrench. TP-M3 x 5 TP-M3 x 5 2. Pull out the pulley cover in the direction of the arrow. Pulley cover Motor mounting process 1.

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

4/5 Port Air Operated Valve SYJA3000 Series

x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

EX120/121/122

M5 1/8 1/4 3/8 SY3000 SY5000 SY7000 SY9000 1.1 2.8 4.5 10.0 SYJ Port size for A, B ports Applicable cylinder size (reference) 25 40 50 Sonic conductance: C [dm3/(sbar)] (representative value) Series Piping with one-touch fittings Metric size Inch size Thread piping 4 6 8 5/32" 1/4" 5/16" M3 M5 1/8 SYJ3000 SYJ5000 SYJ7000 0.46 0.83 2.9 S0700 Port size for A, B ports Applicable cylinder size

76

Mounting hole dia.: 0.41 (10.5) 10 Series IDF100FS/125FS/150FS Data Condensed Water Calculation 45 Atmospheric pressure 14.5 psi (0.1 MPa) 40 Relative humidity 100% Amount of moisture in air g/m3 29.0 (0.2) 35 43.5 (0.3) 58.0 (0.4) 72.5 (0.5) 87.0 (0.6) 101.5 (0.7) 116.0 (0.8) 80% 60% 40% 30 25 145 (1.0) Amount of condensed water CH 18.23.0=15.2 g/m3 20% 20 203 (1.4) B C D 232 (1.6) 15 10

7

m3/h.

Series PF2W Digital Flow Switch For Water

(Fixed SI unit [L/min, or L, m3 or m3 x 103] will be set for switch types without an unit switching function.)

Compact Manifold Regulator Series ARM5

Tightening torque for round head Phillips screws for tie-rods of the regulator manifold. 0.32 0.03N.m M3 thread Square nut (M3) Square nut (M3) Note) M3 threads and square nuts are not included. End block 0.32 0.03 N.m Round head Phillips screw (with SW) (M3) 3. Tightening torque for hexagon socket set screws for DIN rail of the regulator manifold 2.

45

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

Low Profile Slide Table Series MXF

F A A MXH Lr MXF16 MXU Lr = 40 mm 0.07 0.07 0.20 MXS Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 0.06 MXF16-75 MXQ 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MXF 0.12 0.04 0.04 MXF16-50 MXW MXF16-50 0.03 0.03 0.08 MXF16-30 0.02 0.02 MXJ MXF16-30 0.04 0.01 0.01 MXP 0 0 20 40 60 80 100 20 40 60 80 100 120 60 0 40 80 100 20 MXY Load

MXF

Model Bolt Maximum tightening torque (Nm) Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Maximum screw-in depth L (mm) Model Bolt Selection Caution MXF8 MXF8 6 6.5 M3 x 0.5 0.9 M3 x 0.5 0.9 MXF12 MXF12 6 5.5 M3 x 0.5 0.9 M3 x 0.5 0.9 1. If intermediate stop by external stopper is done, avoid ejection. If ejection occurs, it may cause damage.

Compact Vacuum Ejector Series ZA

KJS04-M3 KJL04-M3 Refer to Construction. (page 853) Symbol 0 2 5 Without fitting (M3 x 0.5) 4 (Straight) 4 (Elbow) Without supply Note) adapter (For manifold) Pilot valve (Refer to Table (1).) M Standard (1 W for DC) Note) Nil Y DC low wattage type (0.5 W) Note) Note) O-ring and round head combination screws (M2 x 12) are attached to the supply adapter (M).

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 20 20 10 10 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) 40 2 2 32 D32 1 1 0.5 0.4 0.3

MY1

Load weight Allowable moment MY1MW: M1 MY1MW: M3 MY1MW: M2 MY1MW: m1 200 200 40 50 20 3 100 1 30 2 5 100 10 20 4 50 40 5 4 40 50 30 10 3 MY1MW63 MY1MW63 MY1MW63 30 MY1MW63 MY1MW50 MY1MW50 MY1M63 MY1M63 MY1M63 MY1M63 20 MY1M63 MY1M63 MY1M63 MY1M63 MY1MW63 Load mass (kg) MY1M63 MY1M63 MY1MW63 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 2 20 MY1M50 MY1M50 MY1M50 MY1M50 MY1MW50 MY1MW50 MY1MW50

0.55

DC 5 6 24 VDC 12 VDC Made to Order Nil AC (50/60 Hz) Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

Compact Guide Cylinder

) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2 16 (12 x 2) 3.4 6.5 2 M3 x 0.5 6.5 16 18.5 8 28 14 53 42 57 10.2 24 M4 x 0.7 6 4.3 6 JMGP Series Bore Size 20 (16 x 2) to 40 (32 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL GD 40

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. M3 x 5L Bracket (Part no. ZS-28-B) M3 x 5L 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Mounting Panel Caution Front protective cover (Part no.

LEC-OM071xx

Range Setting Enabled Section Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 4 0 to 1717 0 Immediately Pn863 Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 5 0 to 1717 0 Immediately Pn864 Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 6 0 to 1717 0 Immediately Pn865 Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 7 0 to 1717 0 Immediately Pn866 9