Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Controller/Driver LEC/JXC Series Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor (Servo/24 VDC)/ LECP6 Series Servo Motor (24 VDC)/ LECA6 Series LEC-G Series Step Motor (Servo/24 VDC)/ LECP1 Series Pulse Input Type Page 590 CC-Link Direct Input Type Page 600 Programless Type (With Stroke Study) Page 583 Step Motor (Servo/24

VZ5000

VDC 12 VDC 5 6 9 Manual override Other Option Electrical entry Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector G: Lead wire length 300 mm LN: Without lead wire LO: Without connector MO: Without

VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

JXCx-OMT0001CN

-107No.JXC-OMT0001CN-C 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 mm/s 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] () 15 8 4 18 9 5 24 12 6 24 12 6 [mm/s] () 22 12 6 26 13 7 34 17 9 34 17 9 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20

Air Slide Table Series MXS

MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) D-X Individual -X 57 Series MXS Dimensions: MXS6 Basic style 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 6 J I Max. 10.5 (With stroke adjuster at retraction

3 Port Solenoid Valve Series SYJ300/500/700

For sub-plate style, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust style Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm MN: Without lead wire WO: Without

Large Size Vacuum Module: Series ZR

Note 2) Output current (Rated pressure range) Linearity 1% F.S. or less Maximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green) Sampling cycle: 5 times/sec. 2% F.S. 1 digit (Ambient temperature of 25C) Lights up when switch output is turned ON.

7.4

Voltage Symbol Type 5 24 VDC 6 12 VDC 747 S0700 Series Dimensions 2-Position Single Grommet: S0715(R)-mG-M5 21.2 11.4 M5 x 0.8 1(P) port 5.2 7.7 M5 x 0.8 3(R) port Manual override 3.3 7.4 19 300 (Lead wire length) 43 2 x 3.5 Mounting hole 21.4 300 (Lead wire length) 40 3.2 28 50.3 48.2 Indicator light 34.5 34.5 31.2 31.2 7 11.5 M5 x 0.8 2(B) port 5.7 10 With plug connector/light S0715(R

HRX-OM-Y098

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

JXCx-OMU0026

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke (mm) 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

(32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 Hs 24.5 27 30.5 35 40.5 47.5 20 25 32 40 50 63 80 100 Note 1) Values in

EXxx-OMN0035CN

DYNE 1325 24 V 1~814~21 DC24 V DC24 V 1325 24 V 1~814~21 FE FE -37No.EX-OMN0035CN-A OFF ON SI (3)EX600-DYF EX600-DYPF EX600-DYNF 1 0 V() 24 V() 2 0 0 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 1 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 2 3 0 V() 24 V() 4 5 1 0 V() 24 V() 2 6 3 3 0 V() 24 V() 4 7 1 0 V() 24 V() 2 8 4 3 0 V() 24 V() 4 9 1 0 V() 24 V() 2 10 5 3 0 V() 24 V() 4 11 1 0 V() 24 V

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

Fieldbus system Digital unit

2 Output 4 2 3 0 V (Output) 24 V (Output) 4 Output 5 1 0 V (Output) 24 V (Output) 2 Output 6 3 3 0 V (Output) 24 V (Output) 4 Output 7 1 0 V (Output) 24 V (Output) 2 Output 8 4 3 0 V (Output) 24 V (Output) 4 Output 9 1 0 V (Output) 24 V (Output) 2 Output 10 5 3 0 V (Output) 24 V (Output) 4 Output 11 1 0 V (Output) 24 V (Output) 2 Output 12 6 3 0 V (Output) 24 V (Output) 4 Output 13 1 0 V

LG1H

Regeneration option C D Control circuit power supply (24 V) 24V side of the control circuit power supply (24 VDC) which supplies the controller. L11 L21 L11 Control circuit power supply (0 V) 0V side of the control circuit power supply (24 VDC) which supplies the controller.

DOC1023125

Keep this operation manual accessible for reference when necessary. 24 - . How to Order How to order is shown below. Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

CS1

Air Cylinder Series CS1 125, 140, 160, 180, 200, 250, 300 Variations CJ1 Basic style Standard variations Bore size (mm) Series Action Style Copper free Rod boot Page CJP CJ2 Standard Series CS1 125 140 160 180 200 250 300 Lube CM2 C85 Single rod Series CS1 Non-lube 1.10-2 CG1 (125 to 160 Only) 125 140 160 MB Air-hydro Series CS1 C95 Double acting CA1 125 140 160 180 200 250 300 Lube CS1 Double