2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H/ 702H-L 18 to 30 VDC 10% 18 to 30 VDC PF2M7-L PFMC-L 10% 21.6 to 30 VDC PF3A8 H-L Temperature characteristics (25C standard) 3% F.S. 1 digit (15 to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C)

Air Cylinder Series MB

177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket

LEH_C

(LEHZJ ) 24 - 9.

Electric Actuator / Slider Type 《 AC Servo Motor 》

LECSA LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L1 With auto switch Without auto switch Standard stroke (mm) Bore (mm) L LD LG LH LT LX LY LZ X Y Inch Metric 24 25.5 28.5 32.5 LS 15 15 24 24 B 27 27 36 39 A 54 54 65 69 LS 10 10 14 14 B 22 22 26 29 A 49 49 55 59 12 16 20 25 21.5 21.5 22.5 24.5 13.5 13.5 14.5 15 5 to 30 5 to 30 5 to 50 5 to 50 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8

NCA1

2 1/2 3/8 3/8 2 1 5/16 1.84 2 1/2 3.10 1 1/8 5/16-24 3 3/8 3/8 2 1 1/8 5/16 2.19 3 1/4 3.90 1 3/8 3/8-24 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 2.78 4 4.70 1 3/8 3/8-24 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 3.32 5 5.80 1 13/16 1/2-20 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 4.10 6 6.90 1 13/16 1/2-20 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 4.88 MX2 1.5 ~ 6 WITH EXTENDED TIE-RODS / CAP BORE ROD KK A B V W Y ADD STROKE MM SM

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

CG1

) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5

Electric Actuator with Integrated Guide

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

For 400V class driver, the bus voltage becomes 8V/800V. 5 24 5.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Refer to How to Order on page 11-7-24.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Refer to How to Order on page 11-7-24.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K 8 6

KN Series Nozzles for Blowing

D L1 VMG KN KN 861 KN Series Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Applicable fitting size d L1 A Weight (g) KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12-250 KN-Q12-300 5 5 5 9 9 16 16 23 23 18 18 18 20.5 20.5 22 22 24 24 35 35 35 39 39 43 43 45.5 45.5 6 6 6 8 8 10 10 12 12 1 1.5 2 1.5 2 2 2.5 2.5 3 D 10 A Connecting products with

Modular F.R.L. Unit

E Port size Octagon C T-interface B Center of F.R.L. body A D Model Port size A B C D E Applicable model Y110-M5 M5 x 0.8 11 19 12 14 8 AC10, AC10B Y210-01 1/8 15 42 32 28 19 AC20, AC20B AC20C Y210-02 1/4 AC25, AC25B AC25C, AC30 AC30B, AC30C Y310-02 1/4 Y310-01 1/8 15 53 39 30 19 Y410-02 1/4 19 62 44 36 24 AC40, AC40B AC40C Y410-03 3/8 Caution in Mounting Y510-02 1/4 19 66 46 44 24 AC40-06

MY1

Mass mn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x

Series IDG

600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.