Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5
Pinion assembly MHL-AA1009 MHL-AA1609 MHL-AA2009 MHL-AA2509 5, 6, 7, 20, 21 Nut set MHL-A1017 MHL-A1617 MHL-A2017 MHL-A2517 15, 18, 22 U nut assembly MHL-A1017A MHL-A1617A MHL-A2017A MHL-A2517A 18, 22 Order one finger assembly, pinion assembly, nut set and U nut assembly per unit.
With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103
C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5
3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18
Low temperature limit of temperature range monitoring function 22. Press the [] key. Displays Low temperature limit of temperature range monitoring function setting screen.
22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x
(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4
Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.
Weights (g) 10 16 Bore size (mm) Standard weight 52 96 Additional weight per 15mm of stroke 4 6.5 Axial foot type 22 22 Mounting bracket weight Front flange type 16 16 Double clevis type (with pin) 6 16 The mounting nut and rod end nut are included in the basic weight. The mounting nut is not included with the double clevis type.
Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.
Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate
CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.
28 33.5 29 28 39 35 46.0 8 19 12 44.5 22 60.0 10 22 10 12 (81) (96) 81 113 24 25.7 25 16 Reference dimensions after R thread installation.
()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10. SI . 49 10.1. . 49 10.2. . 51 10.3. . 53 10.4. I/O . 53 10.5. I/O . 54 10.6. . 54 10.7. . 59 10.8. Output status unit . 59 10.9. LED . 61 10.10. . 65 10.11. DIP . 65 2 No.EX##-OMY0006CN 10.12. . 68 11.
L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VZ VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.
Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.
If rotational torque are applied unavoidably, refer to page 22.
, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.
fluid temperature 2-position single, double 4-position dual 3 port valve 5 Max. operating frequency (Hz) 3-position 3 Non-locking push type, Push-turn locking slotted type, Push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Main/Pilot valve common exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 150