Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

connecter G L LO M MO Y YO YZ YOS (1) Standard (1) High pressure (Metal seal only) (1) (1.0W) K (1) Model Sub-plate part No. (1) (0.5W) Y Low wattage (2) (1) VQZ100-S-01(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.

Compressed Air Cleaning Filter Series

AME150C AME450C AME650 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR)) AME250C AME550C AME850 Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT661-12A VQ VQZ Pilot valve assembly VZ VQ11 5 G 1 VS Series VQZ100 0 VQZ200, 300 1 Function Symbol Specification DC (1.0W) AC Standard High pressure (Metal seal only) (1.0W) (1) K Electric entry (0.5W) Y Low wattage Light and surge voltage suppressor Without Electrical entry Symbol (1.0W) Latching (3) L G L LO M MO Y YO YZ YOS Grommet (DC specification) L plug connector with lead wire

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

HRX-OM-T002

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

HRX-OM-Q026

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

Digital Flow Switches Series PF2A

to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Set flow rate range Note 1) 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse value (Pulse width: 50 ms) Note 1) Note 2, 3) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Display units l, ft3

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Bottom Mounting Style / CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial direction (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.

XM, XY

)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

T

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

OMU0023

How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.

Modular Type Filter Regulator Series AW

y y e e r r r u u u Drain Drain Drain Parts list Material No.

CL

Single Knuckle Joint I-G02/G03 Material: Rolled steel I-G04 Material: Cast iron Y-G02/G03 Material: Rolled steel Y-G04 Material: Cast iron NDH10 (Hole dia.) NDH10 MM MM L L RR1 E1 E1 A1 U1 NX NZ NX L1 NZ A Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable bore size (mm) Applicable pin part no. Part no. NDH10 Part no.

Cylinder with Lock

m l H B [mm] [mm] Part no.

CLQ

CW RR CU 63 170 192 B + Stroke G Bore size (mm) CU CW CX CZ G L L1 N RR 63 20 30 22 44 38 8 33.5 M8 x 1.25 14 80 27 38 28 56 43 10 43.5 M10 x 1.5 18 Rod end nut L1 100 31 45 32 64 50 12 43.5 M10 x 1.5 22 16 Series CLQ Accessories Single knuckle joint Double knuckle joint I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Shaft d9 MM ND hole H10 Shaft

EX500

32.3 28.3 47.3 45 l Terminal no.