5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Example of how to order a valve SZ Q TUV approved product Enter the standard part number Example of how to order a manifold SS5Z Q TUV approved product Enter the standard part number Note) Contact P/A for details, as there are limitations on product models, voltage specifications and electrical entry, etc.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

53

V: Power supply voltage HRSH 090 HRSH 090 Power consumption P: 7 [kW] Q = P = 7 [kW] P HRSH Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption HRSE w Derive the heat generation amount from the power e Derive the heat generation amount from the output. HRZ supply output. Output (shaft power etc.)

Lightweight and Compact

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

Slider Type/Ball Bushing Bearing

Note 2) Determination of pressure (P) when making intermediate stop P Ps P > Ps (Refer to page 1529.) (For intermediate stops, refer to page 1527.)

MY1

(Refer to P. 1365.)

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Power Clamp Cylinder

2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !0 Socket head cap screw 105 C CKZN-D050 Note 2) 120 B w Stopper bolt r Bumper !1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Multi-Axis Step Motor Controller

(Option) JXC-W1 p. 16 VUSB cable (Option) JXC-W1-2 Cable length: 3 m p. 16 VController setting software (Option) JXC-W1-1 p. 16 PC Provided by customer. *1 The connected actuators should be ordered separately.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

MB

3 q u @9 #0 #2e y!6#1@8t!2w#3!5 !7 !8 !9 @0 @1 @6 @7 i o 80, 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 !0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

Series VCL

Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D DDE 202-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

Model: 21 (1.8 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: B (w/Bracket), Automatic Cleaning Unit, Louver: S (w/Automatic Cleaning Unit), Filter: U (w/Filter)

Model: 21 (1.8 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: None, Automatic Cleaning Unit, Louver: Y (w/Automatic Cleaning Unit & Adjustable Louver), Filter: U (w/Filter)

Model: 21 (1.8 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: B (w/Bracket), Automatic Cleaning Unit, Louver: Y (w/Automatic Cleaning Unit & Adjustable Louver)

Model: 21 (1.8 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: N (None), Bracket: B (w/Bracket), Automatic Cleaning Unit, Louver: None, Filter: U (w/Filter)