Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Nozzle Type Ionizer

saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0.7 0.7 0.6 0.6 Supply pressure [MPa] Supply pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 20 25 10 15 5 0 200 100 150 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] eFemale threads for piping IZN10E-11 With Stainless steel 316 One-touch fitting + Anti-static tubing Pressure gauge 0.30 O.D.

20

Nozzle size Coil tube Fitting Blow gun Recommended system Distance S coupler TCU0604l-1-20-X6 KQ2H06-02S Up to 20 mm VMG1ll-02-01 KK4P-06H 1 TCU0604l-1-20-X6 KQ2H06-02S Up to 40 mm VMG1ll-02-02 KK4P-06H 1.5 TCU0805l-1-20-X6 KQ2H08-02S Up to 60 mm VMG1ll-02-03 KK4P-08H 2 TCU1065l-1-20-X6 KQ2H10-02S Over 60 mm VMG1ll-02-04 KK4P-10H 2.5 l: B (Black), W (White), R (Red), BU (Blue), Y (Y ellow

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

SJ3A6

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

Air Cylinder

159 + l 150 172 + l 136 158 + l 149 171 + l 32 141 163 + l 156 178 + l 141 163 + l 156 178 + l 40 164 184 + l 182 202 + l 159 (168) 179 (188) + l 177 (186) 197 (206) + l 50 190 210 + l 210 230 + l 185 (197) 205 (217) + l 205 (217) 225 (237) + l 63 195 215 + l 217 237 + l 190 (202) 210 (222) + l 212 (224) 232 (244) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277)

VT307

Dimension n: Stations Stations Formula L1 = 26 x n + 24 L2 = 26 x n + 12 2 76 64 3 102 90 4 128 116 5 154 142 6 180 168 7 206 194 8 232 220 9 258 246 10 284 272 L L1 L2 [ ]: With light/surge voltage suppressor 4-7-8

HRX-OM-Z002

/L] 4.0 or less 4.0 or less * Quoted from the standard, "JRA-GL-02-1994", The Japan Refrigeration and Air Conditioning Industry Association.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Equipment L or R shows the left or right of the filter IN when viewed from front. 100 200 50 l /min (ANR) 200 l /min (ANR) Port size Thread type B (ZFA100) 1 8 1 4 02 01 ZFA200 B (ZFA200) Nil T Rc NPTF F G How to Order Manifold JIS Symbol Indicate both the symbols for air suction filter and bracket for manifold.

ITV

Flat bracket Dimensions L-bracket Description Part no.

5 Port Solenoid Valve Series SQ1000/2000

354.5 375 385.5 L1 L2 L3 L4 22 Manifold Specification Sheet Series SQ1000/Plug-in Unit 1.

3 Port Solenoid Valve

(Indicator light and surge voltage suppressor) 5 + 13 15.5 3 (Mounting hole) 2-2.6 13 3 28.5 [35.5] 32.4 10 G: Approx. 300 H: Approx. 600 (Lead wire length) 1 30.8 [33] 33 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping port) M5 x 0.8 L plug connector (L): V1 4(A)-L-M5 1 2 M plug connector (M): V1 4(A)-M-M5 1 2 13.1 (Indicator light and surge voltage suppressor) (Indicator light and surge

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

20

L1 (Extension nozzle length) Width across flats 14 R1/4 D L L2 H1 Outside diameter 4 Series VMG Dimensios: Nozzle Cover Cover for male thread nozzle [mm] Nozzle cover part no.

Electric Actuator with Integrated Guide

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 28 52.5 81 28 5.3 5.5 SMC SMC SMC SMC 28 56 SMC SMC K K P P C C U U O O S S L L H H 8 3 5 11.5 L2 dimension DIN rail part no.

HRX-OM-W002

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

HRX-OM-X071

Connect the stripped cable to the L, N, PE terminals(For 400V, L1, L2, L3, PE) of the female connector. (Recommended tightening torque: 0.7 Nm) Female connector Screw (Recommended thightening torque : 0.7Nm) PE 2(N) 1(L1) 1(L) 2(L2) PE 3(L3) 200V type 400V type Fig 3-5 Cable connection HRR Series 3.3 Installation 3-11 HRX-OM-X071 Chapter 3 Transport and Setting Up 5.