Pressure Range: 0 to 1 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

ITV

In cases where it is not practical to change the vacuum pump, install a capacity tank (volume depending on the operating conditions) on the VAC side. y The vacuum pressure response time after a change in the input signal is influenced by the internal volume on the setting side (including piping).

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

ITV

(Atmospheric pressure) VEX q Vacuum pressure solenoid valve y Atmospheric pressure valve AMR Input signal Set pressure + t Control circuit r Diaphragm Pilot valve w Atmospheric pressure solenoid valve ITV IC u Pressure sensor VBA Series ITV209 VE Linearity Hysteresis Repeatability 0 1.0 1 VY1 Output deviation factor (% F.S.) Output deviation factor (% F.S.)

IS3000

No. q w e r t y u Description Adjusting screw Setting spring Lever Piston Micro switch Bottom cover O-ring Material Rolled steel Rolled steel Rolled steel Polyacetal Aluminum die-cast NBR IN Ex. 3) + u Plug PLC 3. Thread using for the terminal is M3. Only for gasket mounting style Mounting/Piping Dimensions Caution 1. Allow the space required for maintenance.

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.

: A3 (Bracket C), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: w/o Lead Wire, Bracket: A1 (Bracket A), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: A3 (Bracket C), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

Precision Regulator

0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !2 @2 Bleed Bleed r !3 !2 !5 w AP100 @4 !7 u @3 OUT (2) SUP (1) SUP (1) OUT (2) !8 @3 !6 e @1 @1 e tValve guide tValve guide Working principle (For IR2000) When the setting knob is turned, the nozzle is closed by the flapper allowing the supply air that flows in from the upstream side to pass through the fixed throttle.

NCX2 seies

'Special order only Standard Stroke List Pi ston Speed AirHg dro T y pe * Plate Vpe in lo,v passure lrydraulic operation allo ,s lo^/ sped pislon sped only due b iolemal flow sticlion.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) Size L2 Y (mm) Size 10 X L1 3 to 8 5-(8-Y) to (Y-1) 10 15 9-(14-X) to (X-3) 5 to 14 3 to 9 6-(9-Y) to (Y-1.5) Y = L1= 15 20 8 to 18 10-(18-X) to (X-4) 3 to 10 7-(10-Y) to (Y-1.5) L2 = 20 30 10 to 20 10-(20-X) to (X-4.5) 5 to 13 8-(13-Y) to (Y-2) X = 30 40 10 to 22 12-(22-X) to (X-5) 7 to 15 9-(15-Y) to (Y-2) CRB1 Free-Mounting Type CRBU2 CRB2 Symbol: A11 Symbol