MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

VXA21/22

Pilot port Tightness of Valve (Leak rate) Fluid Seal material (2) Air Non-leak, Vacuum Liquid NBR, FKM, EPDM 106Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V, M (Non-leak, Vacuum). Port A Port P Pilot Pressure Port P (N.O.)

EXxx-OMS0026CN

A IN L/A IN L/A OUT LINK L/A INL/A OUT 11 OUT L/A OUT RUN L/A IN L/A OUT LINK MS [](64 ) RUN MS: LED 27 MS: SI NS: IP IP [IP ]( 19 ) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.

SYJ300-OMU0003

(DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m 1 AC100V50/60Hz )V111 CE L -Q 2 AC200V50/60Hz LN L AC110V50/60Hz LO 3 (AC115V50/60Hz) M 4 AC220V50/60Hz MN M (AC230V50/60Hz) MO *WDC *CE DC WO M8 1 W *M8 P13P14 *P13P14 5 D V115 5 DC24V 6 DC12V S () 1 AC100V50/60Hz Z () *DOZYOZ *AC S 2 AC200V50/60Hz 3 AC110V50/60Hz (AC115V50

Hydraulic

Keeper plate Air release GA GB R J H 2-Rc P CDH9/f8 MM C D E e Width across flats G l 10 f Air release SS + Q + l + Stroke W W CX U +0.4 +0.1 NA T NB ZZ + Q + l + Stroke L K F S + Stroke MA B RR SS + Stroke A ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS L U W f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 38 16 32 15 37 31 3

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Air Cylinder

+ l + Stroke h + l 8 8 8 8 IJ e JH f f JW l ZZ + 2 ( l + Stroke) S + Stroke h + l l + Stroke h + l + Stroke (mm) Bore size Stroke range A AL B1 C D E F GA H1 I J K KA MM NA P S Standard Long stroke 20 Up to 200 201 to 1500 18 15.5 13 14 8 12 2 12 5 26 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 77 25 Up to 300 301 to 1500 22 19.5 17 16.5 10 14 2 12 6 31 M5 x 0.8 depth

Table of Contents

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

CL

Width across flats KA Z + l + 1/2 stroke TDe8 EB EA D e Width across flats B1 l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke 125 to 160 With rod boot Z + l + 1/2 stroke Z + 1/2 stroke A Rc BP lock-up port Unlocked when pressurized B Rc BP lock-up port 2-Rc P Width across flats KA TDe8 EA D e Plug cap 2 positions l S + Stroke ZZ + Stroke h + l ZZ + l + Stroke Stroke range (mm) Bore size

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

CL

+ Stroke 2-Rc P With rod boot EB EA D e 4-LD Width across flats B1 l ZZ + l + Stroke h + l LS + Stroke ZZ + Stroke Width across flats KA Long Stroke When stroke exceeds 1001 mm, mount tie-rod support ring.

Air Cylinder NCA1 Series

Series NCA1 O P T I O N S A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard