Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

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L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.

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H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

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Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

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(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

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M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

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L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

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[101 to 101 kPa] 0 1 2 3 Option Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without cable Sensor cable (3 m) M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.)

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.