21

(NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay, PLC Yes Yes No No No Yes Yes Yes 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Grommet 12 V 2-wire Water resistant (2-color indication) 4-wire (NPN) With diagnostic output (2-color indication) IC circuit 5 V, 12 V 3-wire (NPN equivalent) A96 IC circuit 5 V A93 A90 B54 B64 C73C C80C A33A

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

Plate Cylinder

12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay, PLC 24 V Grommet

VQC

Max. voltage (with no load): 30Vrms (42.4V peak) or less Max. current: q 8A or less (including shorts), and w When controlled by a circuit protector (fuse) with the following ratings: No-load voltage (V peak) Max. current rating 0 to 20 [V] 5.0 100 Over 20 [V] and up to 30 [V] Peak voltage value (2) A circuit (class 2 circuit) with maximum 30Vrms (42.4V peak) or less, and a power supply

Compact Cylinder with Solenoid Valve/

V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V, 12V 3-wire (PNP) 2-wire 12 V A96 A93 A90 A96V A93V A90V IC circuit 5 V 3-wire (NPN equivalent) Yes 100 V 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less 5 V, 12 V IC circuit Solid state auto switches marked with are produced upon receipt of order.

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

AC Servo Motor Driver (Pulse input type/Positioning type ）

0 B Feedback position (10 V/10 Mpulses) (Note 2) _ _ 0 C Feedback position (10 V/100 Mpulses) (Note 2) _ _ 0 D Bus voltage (200 V class and 100 V class: +8 V/400 V, 400 V class: +8 V/800 V) _ _ 0 E Speed command 2 (8 V/max. speed) _ _ 1 0 Load-side droop pulses (10 V/100 pulses) (Note 2) _ _ 1 1 Load-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 1 2 Load-side droop pulses (10 V/10 pulses

240

12 V Reed auto switch Solid state auto switch IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit Relay, PLC 24 V Yes Grommet 12 V 5 V, 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9BAV1 12 V 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes 24 V Grommet A93V2 A90V A93 A90 IC circuit 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water

Rotary Table/

, D-A93(V), D-A96(V) Auto Switch Specifications Grommet Electrical entry: In-line D-A90, D-A90V (without indicator light) Auto switch part no.

2-Color Display High Precision

) 0.6 to 5 V 2.5% F.S. 1 to 5 V 2.5% F.S.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Yes Yes Grommet Relay, PLC 12 V 100 V 24 V IC circuit 5 V, 12 V Solid state switch Relay PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V For 25, 32, 40, 50, 63 Lead wire length (m) Load voltage Electrical entry Auto switch model Pre-wire connector Applicable load Perpendicular (1) In-line Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Compact Guide Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV M9NA v v V v v IC circuit 3-wire (PNP) M9PAV M9PA v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV M9BA v v V v v Water resistant type auto switches can be mounted on the above models,

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Compact Vacuum Ejector Series ZQ

V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.