XL

Fasten the VCR and SWJ (Swagelok) properly, in accordance with the specified torque and methods prescribed by both companies. Reference VCR: 1/8 turn after tightening by hand SWJ: 1 1/4 turns after tightening by hand 3. Attach the valve using body bottom mounting screws (2-M5 P=15). 1.

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

VQ5000

Other models have conduit ports in two locations. 28 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram 2-G1/2 Note) Conduit port 146 111 83.5 106 59.2 46.8 9 9 2n-1/2 (ports A, B) 55.5 M5 ground screw U side 32.5 34.5 n 12 X ... ... ... ... ... ... ...

Table of Contents

Note 2) The accessories should be mounted by user.

SMC Pneumatic Clean Series

"n" pcs.

CNG

x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178) M10 x 1.25 107 8 6 14 M14 x 1.5 44 Rc(PT) 1/8 28 2.5 81 12 10 (12)

LX

yaw moment load Table displacement by pitch moment load Table displacement by roll moment load Displacement at "A" when a load is applied to "F" with the slide table retracted.

CLQ

"n" pcs.

F

Release Button: Imperial: Red Metric: Blue C O N N E C T I O N T H R E A D C O N F I G U R AT I O N Metric M5 M5 x 0.8 Metric 01 1/8 02 1/4 03 3/8 04 1/2 06 6mm Diffent Dia Reducer 08 8mm Diffent Dia Reducer 10 10mm Diffent Dia.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Maximum screw-in depth l (mm) 5 6 8 Maximum tightening torque (Nm) Bolt Model 1.2 2.1 4.4 MXP10 MXP12 MXP16 M3 x 0.5 M4 x 0.7 M5 x 0.8 Mounting Caution 1. Top Mounting 7. Do not allow objects affected by magnets in close proximity to the air slide table.

1

Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV

High Vacuum Angle Valve, XL Series

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

MXS Series Air Slide Table

1 to 6) E Ea Emax Ln(n=1 to 3) M(Mp, My, Mr) Ma(Map, May, Mar) Me(Mep, Mey) Mea(Meap, Meay) Mmax(Mpmax, Mymax, Mrmax) V Unit mm J J J mm Nm Nm Nm Nm Nm mm/s Unit mm/s N N N N 1 mm = 0.0394 in 1 Nm = 0.7375 ftlb 1J = 0.7375 ftlb 1N = 0.2248 lbf 48 Air Slide Table MXS Series Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table

New

Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge Dimensions Size Port size voltage

I

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E136 7.22 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY1D00-M5 D I M E N S I O N S S E R I E S VY1A0 0 1-M5 D I M E N S I O N S S E R I E S VY1B0 0 1M5 01 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Station n) .

VZ100/300/500

of P port and exhaust air from both sides of R port. 40R-1 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 1 M5 Stations A port side 2 stations 02 X port P/R port Thread type M5 x 0.8 1/8 M5 01 C4 C6 B3 B7 P port 20 stations 20 Nil Rc G NPT NPTF One-touch fitting for 4 A port F N T One-touch fitting for 6 R port M5 x 0.8, 1/8