IDG

30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG30H (Type B products group) IDG50H (Type B products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 HA 30 30 AT 40 40 ID 50 50 600 0 200

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod Cylinder: Compact Type Proper Auto Switch Mounting Position (Detection at stroke end) CXSJ6/10 Auto switch model Bore size (mm) Operating Range B D 32 9 6 5 10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

CNG

Material: Carbon steel Material: Carbon steel Material: Rolled steel d Dd9 Dd9 d d D C l m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Refer to L dimensions Enter a number from the DIN rail dimension table below. d L 8 (10) D (24) (35) 5.5 A L Rail mounting hole pitch: 12.5 0 98 24.8 5 160.5 40.6 7 185.5 46.9 1 110.5 28 6 173 43.8 8 198 50.1 2 123 31.1 9 210.5 53.3 3 135.5 34.3 4 148 37.4 No.

•

Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

MY2

Most sensitive position 6 DC () Blue D-F9V Mounting screw M2.5 x 4l D-F9B, F9BV 4.3 Slotted set screw Indicator light 2 DC (+) Brown 20 2.7 2.8 4.6 DC () Blue 3.8 3.1 6.2 4 Most sensitive position 6 30 Solid State Switches/Direct Mount Type D-F9N(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9P D-F9N D-F9NV D-F9PV D-F9B D-F9BV Auto switch

MHZ2/MHZJ2

Standard body Lead wire type Perpendicular In-line Explanatory drawing L L L Auto switch Finger position D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-F9V D-F9WV D-Y7WV D-F9 D-F9BAL D-F9W Model Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed 1 7.5 6 4 1 6.5 5 3 12 16 9 14.5 3 11 9.5 No setting No setting No setting No setting No setting MHZ2-10

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Compressed Air Preparation Filter

L How to Order AFF AM AMD AFF 30 03 BD D Option/Semi-standard: Select one each for a to g.

Series IDG

= 0.7MPa 30 30 40 50 0 40 100 200 300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/

SYJ3000/5000/7000

entry L plug connector D DO With connector Without connector DIN terminal 3 Note) Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

Compact Guide Cylinder

L L Plate Material Aluminum Alloy /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 3 3 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 2 2 10 50 51 100 101 200 100 101 200 10 50 51 Stroke

Fluoropolymer Piping Equipment

E E H L L M Min. port size W M LQ3U11 4 10 9 11 46.5 44.5 14 2.5 10 LQ3U12 3 2 LQ3U21 6 17 16 16 57 55 20 4 14 LQ3U31 10 22.5 19.5 21 79 73 25 7.5 18 LQ3U32 8 6.4 LQ3U41 12 24 22 24 88 84 29 9.5 22 LQ3U51 19 26.5 24 32 103 98 37 16 30 LQ3U61 25 30 26 41 122 113.5 49 22 36 (E, E) (E, E) L, L (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L: Nut material

CM2

D-C7/C8, D-C73C/C80C, D-B5/B6 D-B59W, D-A3lA, D-A44A Reed switch Solid state switch D-H7l, D-H7lW, D-H7lF D-H7BAL, D-G5NTL, D-G39A/K39A 1.4-2 Standard: Double Acting Single Rod Series CM2 20, 25, 32, 40 How to Order Mounting Piping Basic Rear trunnion Integrated clevis Boss-cut basic F Screw-in Built-in one-touch fitting T E BZ B L F G C D U Axial foot Front flange Rear flange Single clevis

Cylinder with Lock Series CLS

hole Width across flats KA 2-Rc(PT) P M GA GA CD hole H10 Shaft d9 MM BZ GB 4-J 90 59 D 30 W CX 5 14 AL CZ A K CT N N U 43 C L H BY S + Stroke B RR Z + Stroke ZZ + Stroke With rod boot 75 l 15 40 h + l Z1 + l + Stroke ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BY BZ C CDH10 CT CX CZ D GA GB GC 0 0.2 0 0.2 0 0.2 + 0.3 + 0.1 + 0.3 + 0.1 + 0.3 + 0.1

CG1

TT TV ZZ TW Z TX TY TZ Z 20 25 32 3.2 3.2 4.5 35.8 39.8 49.4 43.4 48 59.4 139 146 155 178 (187) 138+l 159+l CD-G02 CD-G25 CD-G03 42 42 48 118 125 131 150 (159) 16 20 22 28 28 28 147+l 168+l 153+l 177+l 198+l 170+l (179+l) 40 4.5 58.4 CD-G04 71.4 56 30 30 (207+l) 225+l 193+l (205+l) 173 (185) 205 (217) 50 6 86 72.4 CD-G05 64 36 36 (237+l) 235+l 198+l (210+l) 178 (190) 215 (227) 63 8 105.4

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..