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Pressure 0.003 ~ 1MPa / 0.4 ~ 145PSI Operating Pressure -3 to -100KPa / -0.4 ~ 14.5PSI Pressure Range Vacuum Air Fluid 5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order IRV 1 000 01 Pressure gauge position Vacuum regulator Nil: Standard Thread type Body size Nil Nu Fu Rc NPT G 1 2 3 IRV1000 IRV2000 IRV3000 VAC (Vacuum pump side) SET (Pad side) SMC P K U C S O H L Option Pressure gauge Combinations R: Rear

Pressure setting of 7 Ps|{0.51kgflcmr} (lT1 000 only), 50 PSI{3.51 kg7cm,}, '|0O PSI{7.1kg cml are available in addition lo the existing pressure setting ol 15 PSIII.oftgtcmr), 72 PSI{5.1kg't cm'?), and l3O Ps|{9.2kgflqrr}. . The subdivided pressure range rmproves pfessure accuracy. . The change in zero span cor rol range improves the controlling ope.ation.

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

aid.re and dusl liohl 6uibs * *.rr wn burbs red ihrollh a bui\ 'n m,00o,000 cydes Ac rishls may be used on e'lher 50 or 60 cycle seR'ce spec'a cFoss.sEcTtoN.FrJLL sl?E CLASS3 OOUBLE LIGHT ASSY oPTtot{8 0P, KP, OP DIN COI{NECTOR OINCAP PART I NLl Th. DIN connetorgdid.! proo i.lr,.ribrny . oprro^t|n.on risnt3mouni.d in junclion . liLy b.

in parenthesis are with O-90 Limit Switches Rod end shape: Male thread 0t60 32 Fod end shape: Direct mounting o 141 Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 , 1 Qoriac flTre 148 148 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14g Series KJ, Series I Tl KQ, rV-3, M5. . . . 145 149 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Sensor Range: 0 [Positive pressure (0 to 1 MPa)], Accuracy: ±2% F.S., Port Size: IM5 (M5 Female Thread Through Type), Output Specification: P (PNP open collector 1 output), Lead Wire Termination: S (With M12-4 pin connector, 500 mm), Set Value: P (Normal Output), OUT1 Set Value: 000 (0.0 MPa, 0 kPa, 0 kPa), OUT1 Hysteresis: 1 (0.01 MPa, 1 kPa, 1 kPa)

V0V CANL FG CANH V+ 24V V0V CANL FG CANH V+ BDH BS+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA End resistance End resistance Master Connector with end resistance VSLD FG FG FG BDH CANL BDL FG CANH Type 3 grounding Type 3 grounding Type 3 grounding V+ Branching crimp connectors Twisted pair line with shielding DeviceNet CompoBus/S System

D DDE 202-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line with shield Twisted pair wire Master unit SI unit SI unit FG DG DB DA FG DG DB DA DG DB DA Terminal resistor Terminal resistor SLD FG b) 3-wire type with shield Twisted pair wire Type

DB DA DG DB DA DG DB DA Terminal resistor Master VConector with terminal resister SLD FG FG FG BDH CANL BDL FG CANH with shield Twisted pair Type 3 ground Type 3 ground Type 3 ground V+ Branch crimped connectors 1-3-34 35 Cassette Type Manifold Serial Transmission Type Series SZ3000 SI Unit Part No.

DB DA DG DB DA DG DB DA Master Connector with terminating resistance VSLD FG FG FG BDH CANL BDL FG CANH Class 3 ground Class 3 ground Class 3 ground Crimped connectors for junction Twisted pair with shielding V+ Terminating resistor 30 Cassette Type Manifold Series SZ3000 SI unit part numbers Symbol Specifications Part no.

DE 2-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

DG DG DG SLD SLD SLD CC-Link-dedicated cable FG CC-Link-dedicated cable 5 FG FG DIP SW.1 DIP SW.2 ON EX180 Series for CC-Link 6 1 Figure 2 PWR(V) PWR L ERR 0 1 2 3 4 5 6 7 8 9 10 1 2 1 Thank you for purchasing an SMC EX180 Series Fieldbus device (Hereinafter referred to as "SI unit").

MR-J3T option unit CC-Link connector (CN1) LECSCLECSCMR-J3T option unit CC-Link connector (CN1) Programmable controller CC-Link master unit DA DG DB SLD FG DA DG DB SLD FG FG SLD (Note 1) Termination register DG Termination register DB DA (Note 2) CC-Link Ver.1.10-compliant cable (4) Insert the power line Insert the core of the cable into the opening and tighten it with a flat-blade screwdriver

MR-J3T option unit CC-Link connector (CN1) LECSC2-T LECSC2-T MR-J3T option unit CC-Link connector (CN1) Programmable controller CC-Link master unit DA DG DB SLD FG DA DG DB SLD FG FG SLD (Note 1) Termination register DG Termination register DB DA (Note 2) CC-Link Ver.1.10-compliant cable (4) Insert the power line Insert the core of the cable into the opening and tighten it with a flat-blade

DG 4 DA DA 5 PCA-1567717 M12 4 (28 ) BUS INM12 4 A code(SPEEDCON ) 1 SLD 2 DB DB 3 DG DG 4 DA DA M12 SPEEDCON SPEEDCON SPEEDCON 180 SPEEDCON M12 BUS IN PLC BUS OUT BUS OUT IP67 32 -11No.EX-OMP0004CN-I CC-Link CC-Link PCA-1567720() PCA-1567717() 110 1/2 W 110 (DIP SW-No.2) ON CC-Link Ver.1.00 130 1/2 W SI CC-Link SI 17 ON CC-Link Ver.1.00 130 -12No.EX-OMP0004CN-I PWR INM12

Master unit Remote unit Local unit (Blue) (White) (Yellow) DB DG SLD FG Terminal resister DA Terminal resister DA DA Communication connector for CC-Link DB DG SLD FG DB DG SLD FG CC-Link dedicated cable CC-Link dedicated cable Drawing 2 Connect the terminal resistor between "DA-DB" (Refer to Drawing 3). Terminating resistor Drawing 4 NOTE 1.

Core wire color: Signal name (CC-Link) 1 Shield: SLD 2 White: DB 3 Yellow: DG 4 Blue: DA 1 3 4 Socket connector pin arrangement *1 Number of holes: 5, Total number of pins: 4 A-coded (Normal key) Item Specifications Cable O.D. 7.7 mm Conductor nominal cross section Data pair 0.5 mm2/AWG20 Drain 0.34 mm2/AWG22 Wire O.D.