SMC Corporation of America
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Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Pressure setting of 7 Ps|{0.51kgflcmr} (lT1 000 only), 50 PSI{3.51 kg7cm,}, '|0O PSI{7.1kg cml are available in addition lo the existing pressure setting ol 15 PSIII.oftgtcmr), 72 PSI{5.1kg't cm'?), and l3O Ps|{9.2kgflqrr}. . The subdivided pressure range rmproves pfessure accuracy. . The change in zero span cor rol range improves the controlling ope.ation.

series sizes IRV1000: 60l/min (ANR) IRV2000: 100l/min (ANR) IRV3000: 150l/min (ANR) Setting sensitivity: 0.13kPa or less Modular filter can be used on the SET side Application Examples Suction of work pieces Solenoid valve Vacuum pump Tank IRV Filter Suction pad Work piece With single pressure Solenoid valve Vacuum pump IRV Tank How to Order Filter Suction pad With multiple pressures IRV 000

One-touch fitting SY560--C6 Closed center 3 position 102 109 155 Exhaust center Pressure center Single 72 76 99 2 position Double 88 95 141 C8 ( ) Closed center SY560--C8 8 One-touch fitting 3 position Exhaust center 94 101 147 Pressure center 4 Series SY3000/5000/7000 How to Order Port Block Assembly How to Order Pilot Valve Assembly C4 SY7000 13A Series SY3000 Series SY7000 SY114 5 G SY 3 000

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -46No.PS-OMU0002CN-D () [F82] OFF -47No.PS-OMU0002CN-D [F11] <> [F11] 1000 100 [F11] , [MPa]/[kPa(ZSE20A(F))]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]:) 30[F 0] -48No.PS-OMU0002CN-D [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -49No.PS-OMU0002CN-D [F81] <> [F81] [on]() [oFF]() () (000

1(n_1)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L) 1/4 -1/7 -1/4 OFF -1/7 -1/4 -47No.PS-OMU0005CN-C OFF () [F82] OFF -48No.PS-OMU0005CN-C [F11] <> [F11] [F11] , [MPa]/[kPa(ZSE20B(F)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 31[F 0] -49No.PS-OMU0005CN-C [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -50No.PS-OMU0005CN-C [F81] <> [F81] [on] [oFF]() () (000

)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -48No.PS-OMU0008CN-D () [F82] OFF -49No.PS-OMU0008CN-D [F11] <> [F11] 1000 100 [F11] [MPa]/[kPa(ZSE20C(F))]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]) 32[F 0] -50No.PS-OMU0008CN-D [F80] 30 <> [F80] [F80] 30 ( ) [ECo] (ON) ON OFF -51No.PS-OMU0008CN-D [F81] <> [F81] [on]() [oFF]() () (000

OFF ) / OFF ("o") P_1(n_1)1/10 P1HP1L(n1Hn1L)1/4 -1/7 -1/4 OFF -1/7 -1/4 -39No.PS-OMS0006CN-G OFF () [F82] OFF -40No.PS-OMS0006CN-G [F11] <> [F11] 1000 100 [F11] , 2]/[bar]/[psi]/[inHg] [MPa]/[kPa(ZSE20(F)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 28[F 0] -41No.PS-OMS0006CN-G [F80] 30 <> [F80] [F80] 30 () [ECo] (ON) ON OFF -42No.PS-OMS0006CN-G [F81] <> [F81] [oFF]() () (000

Zero-cut Zero-cut 1%F.S.cut 2%F.S.cut 10%F.S.cut ISE70(1 MPa )[MPa] 1 MPa P_1=0.015[MPa]H_1=0.01[MPa]Zero-cut1.0 [MPa] 0.0(Zero-cut) 1.0(1%F.S.cut) Zero-cut (1.0%) Zero-cut SW SET [F14] Zero-cut -45No.PS-OMV0003CN-G [F80] 30 <> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -46No.PS-OMV0003CN-G [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000

Zero-cut Zero-cut 1%F.S.cut 2%F.S.cut 10%F.S.cut ISE70G(1 MPa )[MPa] 1 MPa P_1=0.015[MPa]H_1=0.01[MPa]Zero-cut1.0 [MPa] 0.0(Zero-cut) 1.0(1%F.S.cut) Zero-cut (1.0%) Zero-cut SW SET [F14] Zero-cut -48No.PS-OMV0008CN-E [F80] 30 <> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -49No.PS-OMV0008CN-E [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

I/O and actuator cables are also identical to the standard LEY Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder