CATALOG VC10

V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

KR

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

CRB2/CRBU2/CRB1

B C D R Model 31 45.5 14 M5 x 0.8 CDRBU2WU10-D 25 47 18 M5 x 0.8 CDRBU2WU15-D 34.5 51 20 M5 x 0.8 CDRBU2WU20-D 47.5 55.5 22 M5 x 0.8 CDRBU2WU30-D 52 Rotary Actuator with Angle Adjuster Free-Mounting Type Series CDRBU2WU Dimensions: 40 (with Angle Adjuster and Auto Switch Unit) Single vane/Double vane type CDRBU2WU40-S, D h Keyway dimensions L b h (h9) L b (h9) Model 52 64 0 0.030 4 20 0 0.030

TABLE OF CONTENTS

V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Aluminum High Vacuum Angle Valve

With indicator K (DN) E H V I G L H A V V M A C U U Without indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N

IIIIIII

0.17 in. 4.4 mn o.T. 0.0E an. l.0mm) T T O.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A E c D E F G H K M N P H 5.O7 (128 9) 4.39 (1 1 1.4) 1 1 8 (30) 1 6 9 t 7 5 '| _5 | 1 " (3) 080 20.4 1 5 7 a{I)l o71 alA) 0 9 6 24 S\ '1.26 (321 1 4 2 t36l 1 2 0 'io 5 ,2/ (6) Millimelsrs in Pargntheses Series NVM MECHANICALLY ACTUATED/PILOT OPERATED DIMENSIONS NVZM45O N\ZM45o-N014 A ts D E F I H J K M N P H

VZ100/300/500

connector (L) VZ32-L-M5 M plug connector (M) VZ32-M-M5 DIN terminal (D) VZ32-D-M5 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-16 17 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 Base Mounted (With sub-plate) Grommet (G), (H) VZ34-01 G H V100 SY SYJ VK Manual override (Non-locking) (Mounting

Air Combination

With drain (Semi-standard: Z) (With color zone) switch drain fitting guide cock guide cock guide H J H J H J H J H J B B B B B B B AC20D-D 28 27 27.8 37.5 37.5 57.5 37.5 58.5 37.5 58.5 104.9 91.4 87.4 93.9 AC30D-D 28 32.5 27.8 43 37.5 63 37.5 64 37.5 64 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AC40D-D 28 41.5 27.8 52 42.5 73 42.5 73 42.5 73 186.9 155.6 153.9 149.5 154 169.5 174 AC40D-06-

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT TF3040C-TX TF3060C-TX [Unit: mm] 3-M6 8-M M4 M4 3-M6 M6 Approx.17 22 22 G 2 F 1 E 2 IN D 1 D 1 D 1 L C 2 K 2 B 5 J A 5 H 5 Model Dimensions [mm] A B C D E F G H J K L M R3.25 length 8 TF3040C-TX 438 412 390 100 175 160 145 200 Approx.190 180 Approx.91.5 (M6) TF3060C-TX 12 35 12.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

Mechanical Valves Series NVM, NVFM, NVZNI

0.17 in. 4.4 mn o.T. 0.0E an. l.0mm) T T O.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A E c D E F G H K M N P H 5.O7 (128 9) 4.39 (1 1 1.4) 1 1 8 (30) 1 6 9 t 7 5 '| _5 | 1 " (3) 080 20.4 1 5 7 a{I)l o71 alA) 0 9 6 24 S\ '1.26 (321 1 4 2 t36l 1 2 0 'io 5 ,2/ (6) Millimelsrs in Pargntheses Series NVM MECHANICALLY ACTUATED/PILOT OPERATED DIMENSIONS NVZM45O N\ZM45o-N014 A ts D E F I H J K M N P

CHKD/CHKG

D H Part no.

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

SMC

D-Y69A/Y7PV/Y69B D-Y7W D-Y7WV D-Y7BAL D-P5WL D-F9G/H D-Y7G/H D-G5NBL D-F8 Solid state switch Reed switch Please refer to the next page for applicable auto switches and cylinders in the fields marked with asterisks (). 182 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LEC-OM07605CN

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * * (8) 8 8 8 CPU CPU (1) # # b . (3) # # d . # # C . 1. ## ## 01 1 64 64 2. *** 3.

AC

Ex.) 2R Without valve function D 3 8 1 2 3 4 Float style auto drain (N.O.) AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

Air Slide Table Series MXS

MTS Retraction End Body mounting section Table mounting section D E E1 H H Q L G K M B C J A MXS-BT8 P F MXS-BT20 MXS-BT25 MXS-BT8 MXS-BT12 MXS-BT16 N Body mounting section A Table mounting section Applicable size Model B C D E E1 F G H P K L M N Q J MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) MXS-BT8 (L) 38 23 12.5 14 40.8 5 8 12 1.4 M3 x 12 16.6 7 15.5 14.6 M3 x 16 M8 x 1 MXS-BT12

Table of Contents

B C D R Model CDRBU2WU10-D 31 45.5 14 M5 x 0.8 CDRBU2WU15-D 25 47 18 M5 x 0.8 CDRBU2WU20-D 34.5 51 20 M5 x 0.8 CDRBU2WU30-D 47.5 55.5 22 M5 x 0.8 11-3-20 55 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Dimensions: 40 (With angle adjuster and auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.