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Shown below is an example of a model selection procedure for an intermediate stop application (including an emergency stop in operation).

an isometric acceleration movement. 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Rotation time (s/90) Moment of inertia0.0025 kgm2 Rotation time0.7 s/90, size 40 will be selected.

This information is needed when contacting an SMC sales distributor. An example of HRS090-A-20 "3~" stands for "3 interphase".

Operation stop Combination Symbol: D1 Combination Symbol: D4 An N.C. solenoid valve is used for the vacuum release valve. An external supply valve must be provided. An external valve must be provided to serve as the supply valve. An air operated N.C. valve is used for the vacuum release valve.

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

Collision speed (mm/s) L unit L unit 1000 1000 Air cushion Air cushion 500 400 300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit

Move an actuator from the origin to 100mm point at 50mm/s. (Step No.1 instruction) Next, move the actuator from the 50mm point to 100mm point by moving it 5 times continuously, 10mm at a time, at a speed of 50mm/s. (Step No. 2) [Normal mode] Step data (e.g.) Threshold Pushing Pushing Moving No.

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Dimensions PFM S-C4/C6/C8/N7--X693 PFM S-C4/C6/C8/N7--X694 7 5 7 5 10.2 10.2 43 1 43 1 A A 51.5 (Max. 58.5) 51.5 (Max. 58.5) IN OUT (34.2) 3 (34.2) 13 3 13 18 18 2 x 3.4 OUT IN B 48 20 B 20 48 2 x 3.4 One-touch fitting Applicable tube O.D. One-touch fitting Applicable tube O.D.

, depth 4 15 15 Mounting datum level D B Q QL Without magnet and switch rail 8 2 x M2 x 0.4, depth 3 3.15 2.5 (mm) Model Z G J H K L M QL Q S V W L MXP8-10 60 40 44 10 21 20 20 32 8 52 32 14 2 x M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 50 20 20 74 65 90 202 Air Slide Table Series MXP Dimensions: MXP10 Z 3 Metal stopper V K 4 5 Max. 5.5 MXH 20 G 2 x M3 x 0.5, depth 5 MXU Max. 3.5 M N

10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

This information is needed when contacting an SMC sales distributor. Model number Serial number Kind and amount of refrigerant * (An example of "HRL300-A-20" model.) "3~" stands for "3 inter phase".

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

+ Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Stroke range (mm) Bore size (mm) J e RR B C F GA GB M NA NB P R S T SS TD TT TX TY TZ l f Q B-rod C-rod B-rod C-rod 1 32 M10 x 1.25 25 to 1800 58 38 16 32 15 11 37 31 3/8 39 141 11 2 113 20 28 58 20 98 21.5 15 52 1 40 M10 x 1.25 25 to 1800 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 12 15 52 52 1/3.5 stroke

speed: V (mm/s) Maximum speed: V (mm/s) Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 63 100 80 200 200 50 40 50 50 100 100 Load weight: m (kg) Load weight: m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed:

to 350 Note 4) Basic Compact Basic Compact Basic Compact Basic Compact Basic Compact Horizontal Max. work load [lb] Note 2) Note 3) Vertical Actuator specifications Electric specifications 20 to 300 Note 4) Horizontal 20 to 350 Note 4) Speed [mm/s] Note 3) Note 6) 20 to 300 Note 4) 20 to 300 Note 4) Vertical 20 20 to 300 Note 4) Pushing speed [mm/s] Note 5) 20 Acceleration/Deceleration

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

20. 7-4-11 12 Compact Cylinder: Standard Type Single Acting, Single Rod, Spring Return/Extend Series CQS 12, 16, 20, 25 How to Order B 20 10 S CQS Without auto switch F9BWV S B 20 10 S CDQS With auto switch Number of auto switches Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com