Compact Cylinder

D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 C Mounting bolt part no.

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AC DC 60 40 1 99 60 120 183 Application Example Maximum 40 N.C. (VX31) N.O. (VX31) C.O.

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SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6

Made to Order

FL1 (A) F1 K (mm) (H) A F1 H FL1 16.5 K 3 Bore size Stroke range 24 32 40 51 21 Up to 1000 22 18 54.5 3 22.5 Up to 1000 : Same as the standard model. 1896

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

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(mm) 3.2 4 6 Effective area (mm2) Nylon (1) (2) 3-applicable tubing Weight (g) D Model D L Q M Urethane 2.9 4.4 10.6 KQ2T23-00 KQ2T04-00 KQ2T06-00 5 7 10 9.6 10.4 12.8 3.4 6.4 13.4 17.5 18 20 4.3 4.5 5.3 15.5 16 17 D D 8 KQ2T08-00 15.2 23 6 18.5 25.6 17.7 15 10 KQ2T10-00 18.5 26.5 6.8 21 40 28.4 25 12 KQ2T12-00 20.9 28.5 7.5 22 57.4 45.4 29 K 16 KQ2T16-00 26.5 34 10 25 100 (84) 40 Note 1)

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Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

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K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

AW

AW10 AW20(K) AW30(K) AW40(K) AW60(K) AR40(K)-06 No.

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

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-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Rotary Actuator

40) Refer to Page 4 for details of simple specials J, K, T and Y.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

25 30 40 11 7 240.5 5.5 36 16 8 245.5 9.5 7 47 34 270.5 39 275.5 30 P P1 Nil Rc 1/8 TN NPT 1/8 TF G 1/8 40 18 8 245.5 11 9 47 39 275.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1286 K series Pin Clamp Cylinder Series CKQ K/CLKQ K G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch K C 50 177 R A L P4DWSC C KQG Built-in strong magnet With magnetic field resistant

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (

Modular Type Regulators Series AR

43.5 43 3.3 169 90 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 3/4, 1 28 27.8 43.5 176 46 3.3 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 95 1 AR Optional specifications AL Bracket mount Panel mount Model M N Q R S T U V W Y Z AW AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 4.5 6.5 30 25 28 40 2 18 18.5 44 5.4 15.4 34 30 55 2.3 25 28.5 14 6 AG 15.4 34 44 5.4 30 55 2.3

CRBU

K Single shaft S Single shaft T Double shaft Y J Y T S K A parallel key is used instead of single flat for size 40.

Modular F.R.L. Unit

Min. clearance for maintenance 25 A AFD30, 40, 40-06 L Bracket (accessory) D A G F K M J C 40 B E IN OUT H OUT Port size P Drain Min. clearance for maintenance With compact auto drain (N.C.)

5

WA B C B1 REC A K N Smooth Smooth ZZ + Stroke S + Stroke N F M H Low Speed (mm) MQ Bore size (mm) A AL B B1 C D E F G H H1 J K KA RHC 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 63 35 32 85 27 64 20 40 10 17 58 11 M10 x 1.25 7 18 80 40 37 102 32 78 25 52 14 21 71 13 M12 x 1.75 10 22 100 40 37 116 41 92 30 52 14 21 72 16 M12 x 1.75

Rotary Actuator/Vane Style Series CRB2

(mm) (mm) Size 15 20 30 40 Size Q1=M Q1=M 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 M3 x 0.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = L1 = L1 M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 3.3 3.3 L1 M5 x 0.8 M5 x 0.8 4.2 4.2 4.2 4.2 Q1 Q1 Symbol: A50 Shorten both long and short shafts. Applicable shaft type: Y Symbol: A53 Shorten both long and short shafts.