Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

SMC Pneumatic Clean Series

Bore size (mm) Cushion valve Width across flats (mm) Socket wrench JISB4648 Hexagon spanner wrench 1.5 20, 25, 32, 40 1.5 snap ring 21 Series CM2W 10-/1121-/22Double acting, Double rod cylinder/ 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 H7B 21 C D M 2 W L 40 150 H7B Nil Built-in magnet Number of auto switches 2 pcs. 1 pc.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

Refrigerated Air Dryers

IDFmF-m-K IDF4E to 75E IDFmE-m-L Refrigerant R407C (HFC) IDF F With a heavy-duty auto drain*1 (applicable to moderate pressure) IDF370D IDF370D-m-L IDU3E to 75E IDUmE-m-L With a motor type auto drain*2 IDF4E to 75E IDFmE-m-M p. 30 IDF190D, 240D IDFmD-m(-m)-M IDU3E to 75E IDUmE-m-M With a metal name plate IDF100F to 150F IDFmF-m-P p. 30 IDF4E to 75E IDFmE-m-R Refrigerant R407C (HFC) IDF D

Cylinder with Lock

1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

) Min. operating pressure differential origin line (P1 + 1.033) = (1 to 1.89)(P2 + 1.033) 1.0 Upstre am pre 0.9 ssu re of val ve 0.8 Downstream pressure of valve (P2) [MPa] P 1 1 0.9 .0 0.7 M Pa 0.8 Subsonic 0.6 Critical pressure 0.7 0.5 0.6 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD70 Port size 1 1/4 JSXD80 Port size 1 1/2 JSXD90 Port size 2 35 50 10 20 30 40 40 20 40 60 50 20 40 60

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

2–4

Nil (Example) A73C 3 m L A73CL 5 m Z A73CZ None.

2/3 Port Valve

Ambient and Fluid Temperature Ambient temperature C Fluid temperature C Temperature Water (Standard) Air (Standard) Oil (Standard) Vacuum (V, M) (3) Max. Min. 40 1 60 5(1) 40 5 40 40 5 5(2) Note 1) Dew point: 10C or less. Note 2) 500cSt or less. Note 3) "V", "M" in the parenthesis are option symbols.

HRX-OM-Q026

HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity . 8-18 8.5.1 HRSH100-A-20/40-, HRSH100-W-20/40. 8-18 8.5.2 HRSH150/200-A-20/40-HRSH150/200/250-W-20/40. 8-18 8.5.3 HRSH250/300

High Vacuum Angle Valve, XL Series

The U type is DC only. 40 50 63 80 Electrical entry G Grommet (lead wire length 300mm) H L Grommet (lead wire length 600mm) L type plug connector M M type plug connector Flange type Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Solenoid valve action Nil 2 position single W 2 position double Solenoid valve direction K Left flange surface Rated voltage

Table of Contents

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 36 Series VZ3000/Base Mounted Manifold Specifications Manifold Standard Manifold Specifications Type 40 Type 41 Type 42 Type 43 Model Manifold

MY2

C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40

SMC Pneumatic Clean Series

Cn: ISO Class 3 ISO Class 2 ISO Class 1 1 N: Class no.(1 to 9), intermediate class (1.1 to 8.9) D: Measured particle diameter (m) 0.1:Constant number (m) 0.1 1 10 Particle diameter, D (m) Front matter 24 Air cylinder 20, 25, 32, 40, 50, 63, 80, 100 10-/1121-/22Series CG1 How to Order Lubrication Clean series Rubber bumper/20 to 100 Air cushion/40 to 63 N A 10 11 Relief type Vacuum suction