ITV

0 VEX t 13 O-ring retainer Aluminum alloy 14 Seal NBR SRH !2 i Resin 15 Bowl assembly Silicone rubber u SRP 16 Sub-plate Resin 17 Seal NBR SRF 18 Control circuit assembly OUT SUP 19 Solenoid valve !3 VCHR 20 O-ring NBR w @1 @0 o 21 O-ring NBR ITV ITV 22 O-ring NBR e 23 Round head Phillips screw Steel IC Parts in contact with fluid are indicated with a mark .

MG

9 w @7 !0 y !2 @5 !1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

10

w u o !

Step Motor Controller

200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40 135 2 x 6 Mounting hole

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

Modular Type Regulators Series AR

e q t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.

Vacuum System Peripherals:

q (20 stations maximum) r e t r e w q Number of ejector/valve stations Alignment (for special specifications) U side D side 13-14-22 22 e Valve Model Fill in the blanks below with symbols of necessary specifications.

A_HEC-OM-K001

P a r i t y B i t Sets parity bit for communication. Without: Without parity Function M O D E < W i t h o u t Odd: Odd number Even: Even number <4> Data length setting: Mode indication Data Length Default value: 8 Bits Setting range 7 Bits, 8Bits Indicated contents Data length Data Length indicates that it is data length setting mode.

CATALOG VC10

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CG5-S

(G) T0403 Colour symbol -20 T1075 Colour symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Colour symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Colour symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Colour symbol -20 White (W) Blue (BU)

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

CJ5-S

0 t !3 w With air cushion !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !

CJ5-S

0 t !3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

JIS Standard Hydraulic Cylinder

4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Electric Grippers

4 q u w e r t !7 Component Parts No.

Cylinder with Lock

Symbol: A30 30 30 30 MM DA MM W L W H L A H A AL H A T T MM 37 MWB Series Made to Order Common Specifications Please contact SMC for detailed dimensions, specifications, and lead times.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 EA 8.5 13 EC 9 13.5 EY 36 56.5 FA 56.4 67.8 h 6 6 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) W 25.8 38 E 17.5 25 Shock absorber model RB1412 RB2015 8-13-19 20 Series MY2 Side Support Side support MYC-SA G 2-H C B A F E D Courtesy of Steven

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load