Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M + T

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: M + T

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M + T

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + G + M + T

Cylinder with Lock

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 20 MWBW Series Dimensions Basic: MWBWB (Rc, NPT, G) BP GD GB GB Unlocked when pressurized GC GD GB GD (Rc, NPT, G) P Rod side cylinder port GC GA (Rc, NPT, G) P Head side cylinder port GE W GE W GE W (Rc, NPT, G) BP GF GA Manual lock release bolt Width across flats KC Cushion valve 32 4 x J Width across flats KA Thread depth MC Width

Series VQ Base Mounted Metal Seal/Rubber Seal

(mm2)(Cv) Silencing effect dB Fittings size d Eflective area Serise Model A L D 20(1.1) 8 AN200-KM8 59.3 77.8 22 30 VQ1000 How to Order Regulator unit VVQ1000-AR-1 Indicate an option symbol -G for the manifold no. and be sure to specify the mounting position and number of stations by means of the manifold specification form.

A

N G D O U B L E A C T I N G S I N G L E R O D S TA N D A R D S T R O K E Bore Size Stroke 12, 16 5, 10, 15, 20, 25, 30 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105 4 6.5 14 38 M6 x 1 8 13 4 4 5 8.9 30 163 50 Up to 1900 Up to 1000 32 40 16 20 66 G 1/4 32 69 M16 x 1.5 24 106 5 8 14 46.5 M8 x 1.25 17 4 4 6 5.1 37 179 63 Up to 1900 Up to 1000 32 45 16 20 77 G 3/8 38.6 69 M16 x 1.5 24 121 5 8 16 56.5 M8 x 1.25 17 4 4 9 6.3 37 194 80 Up to 1900 Up to 1000 40 45 17 25 99 G 3/8 38.4 86 M20 x 1.5 30 128 10 16

Basic Type/Direct Mount Type

14 17 20 22.5 28 33 42 48 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 3.5 4.5 6 7 6.5 8.5 11 15 16 P (Piping port) Model Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 Note 2) The astrisk denotes

CLQ

78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking