Industrial Filters

This type has a vertical structure, so there is little loss of filtrate. P.35 Maintenance and inspectionelement replacement in particular is easy. When used for a gas, the product is handled as a class 2 pressure vessel compliant special order product.

CLS

Extend the dimensions of A and H when using a single/double knuckle joint together with a rod end nut.

CRQ2

The rotation angle can be adjusted between 90 to 190. n o ti r a a n t o g Rotation starting point 10 10 e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at a n t o g Rotation starting point End of rotation A A R e A Lmax Lmax Size 20 30 40 Lmax 24 27 31.5 Size 10 15 20 30 40 Size 20 30 40 Rotation starting point 15 18 24 27 31.5 24 27 31.5 10 End of rotation

CS1

Refer to p.1.10-20 for dimensions of auto switch setting position and mounting height. Refer to p.1.20-8 for auto switch min. mountable stroke. 141 325 160 437 176 55 105 421 80 40 0.17 Stroke 146 175 390 466 55 190 451 115 40 90 0.17 Stroke In case of rod boot style, min. stroke is 30 mm or more.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5)

13

Vacuum Pad: ZPT P. 13-11-2 Large/Heavy Duty Type (40 to 125): ZPT/ZPX P. 13-11-72 Large Size Bellows Type (40 to 125): ZPT/ZPX P. 13-11-86 Ball Joint Type (10 to 50): ZPT/ZPR P. 13-11-104 Free Mount Cylinder for Vacuum: ZCUK P. 13-12-2 Drain Separator for Vacuum: AMJ P. 13-13-3 Vacuum System Peripherals: P. 13-14-2 Related Products: P. 13-14-13 Manifoid Specification Sheet P. 13-

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

G r a p h i c O p e r a t i o n Te r m i n a l Actuator cable* Pages 566, 581 Controller type Standard cable Robotic cable LECP6 (Step data input type) LE-CP-m-S LE-CP-m LECA6 (Step data input type) LE-CA-m LECP1 (Programless type) LE-CP-m-S LE-CP-m The * mark: Can be included in the How to Order for the actuator.

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

AZ1000

200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch A (mm) FV4

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr=40 mm MXQ6-30 0.03 0.015 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 0.04 MXQ6-20 0.02 0.010 MXQ6-20 MXQ6-40 0.03 MXQ6-40 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

P/A as a contact protection box may be necessary.

Digital Flow Switches

OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown 6 2 Blue + SMC FLOW SWITCH 5 1 12 to 24VDC 35.8 40 A Series PF2A5 UNIT PF2A30-A RESET SET OUT2 NC 8 Load 4 Sensor OUT1 Panel fitting dimensions Black 3 x 7.2(=21.6) 7 3 Load 8-M3 36 +0.5 0 6.4 Brown 6 2 + Blue 5 1 12 to 24VDC 1 2 3 4 Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white

SQ1000/2000

SQ2 40 3 4 5 3 4 5 3 position: SQ2 41 y e q w e y e q w e u u SQ2541 SQ2441 SQ2341 SQ2540 SQ2440 SQ2340 (A) (B) (A)(B) 2 4 (A)(B) (A)(B) (A)(B) (A)(B) 2 4 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1)(P)(R2) 5 1 3 (R1)(P)(R2) 5 1 3 (R1)(P)(R2) (R1) (P)(R2) Dual 3 port valve: SQ2 41 A B C Parts list e q w e w y No.

Digital Flow Switches, Series PF2A, Series PF2W

Use this sensor by connecting to P/A remote type display unit Series PF2W3.

Series AP500

100 0.62 90 40 0.28 0.55 80 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

NCA1

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if the surge is applied repeatedly. When a load, such as a relay or solenoid which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

VQ5000

B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for

VQ7-6/7-8

Type VV72-142 118 9 67 20 (4-Rc1/8) Port P, R1, R2 for Rc3/4 only Indicator light 18 U side 40 (53) 23 R4.5 60 (73) P= 56 Manual override B B B B B PA 14 42 18 SMC SMC SMC A A A A B B B A A A A A PA PA PA L1 L2 SMC 4n-Rc3/8, 1/2 PA R side L side (2n-Rc1/8) D side 2 82.5 154 (single) 17 175.5 (double) 180.5 175.5 (3 position) 59 62 94 80.5 139 14 12 4-Rc1/8 (pilot pressure exhaust port)

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,