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} 1.6 (20) 15 EB P EA 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug connector with cover (LL) 3 52-SY5420-LL-01 (-F2) 5 L 156 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire length) 189.6 Lead wire marking No.1 (+), No.2 () 0.75 mm2 101.1 7 ATEX Compliant Body Ported Type Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694

SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double 2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate

The compatibility is indicated for fluid temperatures specified for the respective products (50C or less). 7. Do not use liquids that will cause the wetted sealant to swell.

34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

Type 01 Insert Plug TYPe Lead Wires After plugging in, pull lead wires taut to ensure that connection Hun to Renmte Jurction Cowr (Tgpe O 7 ) .Turn the knob O of Junction cover lD on the manifold block side by hand or slotted screwdriver in the C-O direction (closedlo open) 90 degrees. While holding the knob and upper part ofjunction cover, pull outward to remove it.

Type 01 Insert Plug TYPe Lead Wires After plugging in, pull lead wires taut to ensure that connection Hun to Renmte Jurction Cowr (Tgpe O 7 ) .Turn the knob O of Junction cover lD on the manifold block side by hand or slotted screwdriver in the C-O direction (closedlo open) 90 degrees. While holding the knob and upper part ofjunction cover, pull outward to remove it.

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 #10-24UNC1-5/8 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-5/8 2-7/8 3-1/8 3-3/8 3-7/8 4-3/8 4-7/8 5-3/8 1/4-20UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #4-40UNC1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 2-3/8 2-5/8 2-7/8 3-1/8 3-5/8 4-1/8 4-5/8 5-1/8 #6-32UNC1-3/8 1-1/2 1-5/8 1-3/4 1-7/8

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

ON/OFF 2 7 "8"7 "-"()7 digit() 1digit=1 kPa 1,2,3,,99,100 1 kPa 1 5[V]F.S.=514[V] 1F.S.40.010.04[V] F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF (29 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () NPN () () ()()( ) () -11No.PS-OML0002CN-G ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(K)+1(M)) 4.995(V)0.555 V ) 29 ON-OFF

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

View A Data Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-25 22 For details about certified products conforming to international standards, visit us at www.smcworld.com.