CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5 wire oil resistant heavy duty cord (0.15mm) 01/T1 types approx. 60g, W1 type approx. 80g, C4/C6/M5 types approx. 92g (each including 0.6m lead wires) Port size Lead wires Weight Note: When equipped with auto shift function, the following ranges can be set.

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: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 Port size C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads Lead wires Weight 5 wire oil resistant heavy duty cord (0.15mmX) 01/T1 types approx. 60g, W1 type approx. 80g, C4/C6/M5 types approx. 92g (each including 0.6m lead wires) Note: When equipped with auto shift function, the following ranges can be set.

Speed Controller with

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free flow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled flow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free flow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical

7.4

Voltage Symbol Type 5 24 VDC 6 12 VDC Note) For symbol, refer to page 741.

TA301

In the case of 6 stations or more, supply pressure from both sides of P port. In the case of common exhaust type, exhaust air from both sides of R port as well. A port size Symbol Port size Exhaust style Individual exhaust Common exhaust 01 1 8 VVTA300-051-01 1 pc. VOA301 4 pcs. DXT060-51-13A1 pc. Manifold bases same as those for Series VVT300 manifold valves are available.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

Modular Type Air Filter Series AF

W AF30 to 60 Name plate and caution plate for bowl in imperial units (PSI, F) Note 6) AF10 to 60 Z When more than one specification is required, indicate in ascending alphanumeric order. Note 5) Without a valve function. Note 6) This product is for overseas use only according to the new Measurement Law.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

6 !7 !8 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

6 !7 !8 !

ML1

6 !7 !8 !

Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

Speed Controller with

Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective

ML1C

5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 10 -X 1113 ML1C Series Stroke Adjustment Unit EA EB EC ED EF EY S T EH EI TT h i Part no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !3 O-ring NBR M3 type PVC !4 Gasket M5, U10/32 type NBR, Stainless steel Note 1) AS220 type is electroless nickel plated. Note 2) AS220 type is made of steel.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.