VQ20/30

(Station 5) 2 3 Nil 00N 00T 00F VQ20 VQ30 Rc 3/8 NPT 3/8 NPTF 3/8 G 3/8 VQ21M1-5G-C8 1 set Stations VC 01 1 station is the symbol for assembly. Add a in front of the part numbers for solenoid valves, etc., to be mounted.

Regulator for 2 MPa Series ARX20

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

4

Exhaust port type 2 3 Common exhaust Individual exhaust Ordering example: VV307-01-052-01-F 1 pc. (5 station manifolds base) VO307-1G14 pcs. DXT060-51-13A1 pc.

VT307

Figure: For N.C. 4-7-6 7 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT307 Dimensions: Common Exhaust (Interchangeable with VT301 for mounting) VV307-01-2-01-F (Applicable cable O.D.)

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

AC Servo Motor Driver (Network card type ）

PD09]. 3 6 3.

SV

FG FG 24 V 0 V 24 V 0 V 24 V 0 V 24 V 0 V Slave unit 75 Slave unit 03 Slave unit 01 Master unit ZW-31LM Type 3 ground Type 3 ground SHIELD SG L2 L1 SG L2 L1 SHIELD SG L2 L1 SHIELD SG L2 L1 Type 3 ground Type 3 ground SHIELD FG Twisted pair wire with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-2-46 43 Series SV Series EX120 Dedicated Output Serial Wiring Type F1 NKE Corporation

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

NCG/CG1

10 17.5 17.5 20 20 15 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 22 7 38.5 3.5 15 36 49 25 8 45 3.5 16 44 58 2-TD8 (Pin O.D.)

Series VQ Metal Seal/Rubber Seal Body Ported

S 4 (2) (3) With name plate Built-in silencer (Direct exhaust) Stations (4) 01 1 station Note 1) When specifying more than one option, please list alphabetically.

SYJA300

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure MPa Pilot pressure range 0.5 N.C.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

Miniature Regulator

Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.

ZSE2/ISE2

-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET

CNG

M8 x 1.25 24 1/8 21.5 2 65 141 (149) 4 6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 4 6.6 33 142 (151) 3 68 84 16.5 8.5 10 4 12 Without rod boot With rod boot Bore size (mm) 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(Except for when the version does not match or when in SIO mode) The display color can be set to red or green. 4 Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

Positive pressure ISE2 ZSE2 Vacuum Piping specifications Wiring specifications Single mounting R 1/8 Note 2) Grommet type (Lead wire: 0.6 m) 01 Nil Single mounting NPTF 1/8 Note 2) Grommet type (Lead wire: 3 m) T1 L Connector type (Lead wire: 0.6 m) 0X C W/suction filter (Mounting on ZX unit) M5 x 0.8 Connector type (Lead wire: 3 m) W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY