10

20 D-A5l D-A6l n (Different surfaces) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces

48

32 40 10 20 32 40 10 16 20 25 10 16 20 25 32 40 4 6 10 14 CAT.NAS100-77 Controller Step data input type for servo motor Programless type Step data input type for step motor Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Driver AC Servo Motor Driver Incremental type AC Servo Motor Driver

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

24

25 5 5 20 20 25 16 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] 460 Model Selection MGP Series Horizontal Mounting Ball Bushing (19) L = 50 mm, V = 200 mm/s or less (20) L = 100 mm, V = 200 mm/s or less MGPL16 to 25 MGPL16 to 25 10 10 25 25 25 20 25 20 5 5 20 16 20 Load mass m [kg] Load mass m [kg] 16 16 16 1 1 0.5 20 50 76 75

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1

Compact

20 20 65 28 27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

CHKD/CHKG

Load voltage Auto switch model Lead wire length (m) 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Electrical entry Pre-wired connector Wiring (output) Perpendicular 20, 25 32 to 100 20, 25 32 to 100 In-line Special function Applicable load AC DC M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) M9N M9P M9B M9NW M9PW M9BW M9NA1 IC circuit 5 V, 12 V Reed auto switch Solid state auto switch

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Rod clevis: GKM (ISO 8140) l1 [mm] Bore size [mm] Part no. e b d f h11 (Shaft) f H9 (Hole) l1 c (Min.) a (Max.) 32 GKM10-20 M10 x 1.25 10+0.5 +0.15 40 10 10 52 20 20 40 GKM12-24 M12 x 1.25 12+0.5 +0.15 48 12 12 62 24 24 50, 63 GKM16-32 M16 x 1.5 16+0.5 +0.15 64 16 16 83 32 32 80, 100 GKM20-40 M20 x 1.5 20+0.5 +0.15 80 20 20 105 40 40 125 GKM30-54 M27 x 2 30+0.5 +0.15 110 30 30 148 54 55

ISO Standard Hydraulic Cylinder

D-M9 D-M9W D-M9A D-M9V D-M9WV D-M9AV Bore size (mm) 80 Auto switch model (n 2) 2 40 50 63 100 20 + 40 20 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-A5/A6 D-A59W D-Z7/Z80 (n = 2, 4, 6, 8 ) Note 1) 4.5 5 6 7.5 9 (n 2) 2 20 + 30 20 (n = 2, 4, 6, 8 ) Note 1) 4 4.5 4.5 5.5 5.5 D-F5/J59/F5W D-J59W/F5BA D-F59F/A5/A6 (n 2) 2 20 + 55 20 10.5 12 14.5 (n = 2, 4, 6,

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Compact Rotary Actuator Series CRQ2

Description 10 20 30 50 Seal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40

Tie-rod Type Hydraulic Cylinder

83 340 34 170 20 16 160 174 284 89 375 38 212 24 20 424

Air Slide Table Series MXP

) 40 8 8 8 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.03 0.04 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.06 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.05 MXP8-10 MXP8-20 MXP8-10 MXP8-20 0.03 0.02 0.04 0.02 0.03 0.02 0.01 0.01 0.01 0 0 0 20 40 60 Load (N) 20 40 60 Load (N) 20 40 60 Load (N) 10 10 10 L = 100 mm L = 100 mm L

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 60 60 60 D-M9A 20 15 2 pcs. (Different surfaces) 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 35 35 35 D-M9AV 2 pcs. (Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 70 D-Z7/Z80 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs.

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series