Environment

0 i o e r t q u !1 !2 !3 !

3 Position Cylinder Series RZQ

P2 [MPa] 0.75P1 0.75P1-0.012m 0.75P1-0.0078m 0.75P1-0.0050m 0.75P1-0.0031m 1.5P1-0.024m 1.5P1-0.016m 1.5P1-0.010m 1.5P1-0.0063m Bore size (mm) 32 40 50 63 32 40 50 63 Orientation Circuit Horizontal A Graph 3 10 Line Circuit Orientation Movement Down A r e Extension 2 3 4 5 A Horizontal e r Retraction e Extension A Down Overrun (mm) e Retraction Up C w q Extension 1 B Up e Retraction q P1

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Compressed Air Preparation Filter

E E D C Center of body Center of body B C B (Excludes the Y300T-D) EE Part no.

Clamp Cylinder with Lock

7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

IZx-OMP0064

50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1

HRX-OM-Q026

HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Air Cylinder NCA1 Series

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

45

port) Applicable tubing O.D.: 10 4 6 8 L plug connector M plug connector DIN rail holding screw 300 (Lead wire length) 300 (Lead wire length) (Rail mounting hole pitch 12.5) L1 (mm) Stations n L1 L2 L3 L4 2 stations 148 137.5 118 15 3 4 5 6 7 8 9 10 stations 135.5 125 102 16.5 160.5 150 134 13 185.5 175 150 17.5 198 187.5 166 16 210.5 200 182 14 223 212.5 198 12.5 248 237.5 214 17 260.5

33

HRS HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRSE HRZ HRZD Lots of variations are available in response to the users requirements.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Support Guide/11-LEFG Series

depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60) 32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Driver side crimping terminals (Note 2) Applicable tool Symbol Crimping Manufacturer Body Head Dice terminal a FVD5.5-4 YNT-1210S (Note 1)b 8-4NS YHT-8S c FVD14-6 YF-1 E-4 YNE-38 DH-112 DH122 d FVD22-6 DH-113 DH123 (Note 1)e 38-6 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 (Note 1)f R60-8 YPT-60-21 TD-113 TD-125 Japan Solderless YF-1 E-4 YET-60-1 Terminal g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.