Metal Seal/Rubber Seal Series VQ Body Ported

Blanking plug KQ2PDimensions 23 04 06 A L D Model Applicable fittings size d It is inserted into an unused cylinder port and SUP/EXH ports.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

D-M9WV D-M9AL D-M9AVL 16, 20 U 25 B A D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAVL 16, 20 U A B 32 to 50 U A B 32 to 50 D-A9 D-M9 D-M9W D-M9AL D-A9V D-M9V D-M9WV D-M9AVL U B A 1384 Stopper Cylinder / Fixed Mounting Height Series RSQ Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height

7.5

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

V100

) (D, Y) VS N.C.

Cylinder with Turntable Series MGT

As a rule, it should be turned about 90 past the position at which tightening can be felt. 456 Cylinder with Turntable Series MGT Minimum Stroke for Mounting Operating Range (mm) (mm) Auto switch model Bore size No. of auto switches 100 80 63 Auto switch model 63 80 100 D-A9/A9V D-A9 D-A9V D-M9 D-M9V D-Z7 D-Z80 D-Y59 D-Y7P D-M9W D-M9WV D-Y69 D-Y7PV D-Y7W D-Y7WV 11 10.5 10.5 D-M9/M9V D-M9W

5 Port Solenoid Valve

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

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With head end lock D-M9 D-M9V D-M9W D-M9WV D-Z7 D-Z80 D-Y59 D-Y69 D-M9A D-M9AV D-A9 D-A9V D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch Auto Switch Proper Mounting Position [mm] *1 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW Bore size A B A B A B A B A B 20 9 38 5 34 4 33 25 9.5 38 5.5 34 4.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

High Vacuum Angle Valve

D-G

Compact Cylinder

D-A90, A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch Weight OUT ( ) Blue Unit: g Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V D-A93, A93V 0.5 6 6 6 6 8 8 Lead wire length (m) LED Brown OUT (+) Brown 3 30 30 30 30 41 41 Contact protection box CD-P11 CD-P12 Resistor Dimensions Unit: mm Reed switch Zener diode D-A90/D-A93/D-A96 OUT () Blue 2 2.8 4.5 Blue 2.7 4 24.5 (22

Compact Hydraulic Cylinder

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V CHQ CHQ CHK 32 to 100 20 CHN Approx. U CHM 25 CHS CH2 Approx. U B A CHA B A Related Products D-F7 D-F7W D-J79 D-J79W D-A7 D-A7H D-A8 D-A8H D-F7V D-F7WV D-F7BA D-F7BAV D-F7NT D-F79F D-J79C D-A73C D-A80C 32 to 100 DApprox. U B A Approx.

SX

M Special specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Valve Single Unit

D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

Cylinder with Lock Series CNS

Auto Switch Mounting Height (mm) D-Z7/Z80 D-Y5/Y6 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BAL Hs D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Hs Auto switch model D-A9 D-A9V D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A3 D-G39 D-K39 D-A5 D-A6 D-A59W D-A44 DBore size (mm) -X Hs Hs Hs Hs Ht Ht Ht Ht Ht Hs 125 140 160 69 69.5 71.5 69.5 69 69.5 116 126 75.5 69.5 74.5 70 Individual -X 76 76 77.5 76 76 76

Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

Compact Cylinder

Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch Unit: g Weight CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Auto switch model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93(V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

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D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the