VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

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F = degrees Fahrenheit S = SeCOndS NUmin = Normal liters per mlnute World Wide QS\E Support...

Valve Single Unit

A: Orange B: Green 17.5 16 14 12.5 17 15 (Rail mounting hole pitch 12.5) Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

Compact Hydraulic Cylinder

4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

MHL2

Auto switch mounting groove (4 locations) (Finger closing port) (Finger closing port) Rc 1/8 Rc 1/8 D(Rack screw) 2-M10 x 1.5 20Width across flats 17 (2 locations) Width across flats 19 (2 locations) (Piston rod and rack screw) 2-M12 x 1.75 Closed E Open F 4-M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 336 450 Note 1) J dimension is at fully closed.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

AMD800/900/1000 SGP-E, SS400 SGP-E, SS400 No. Description AMD801/901 SGP-E, SS400 Filter case Cover q w AMl SS400 Replacement Parts Related poroducts Part No. AMD800 AMD801 AMD900 AMD901 AMD1000 Material No. Description NBR 63174 63174 63174 3 pcs. 63174 3 pcs. 63174 5 pcs. Element Packing e r 63148 63148 63148 3 pcs. 63148 3 pcs. 63148 5 pcs.

Air Cylinder CLA Series Fine Lock Model

Vertical downward mounting (use Spring lock-up) ON OFF Locking ON Extend up E E OFF Lockinq As compared wilh Diagram 3, this circuit employs 5-port instead A and s-port 3 position solenoid valve (pressure center) instead of Sol As compared with Diagram 2, this circuit employs 3-port 2 position solenoid valve inslead of s-port 3 position solenoid valve leaving the others unchanged.

Digital Flow Switches Series PF2A

None e-con connector x 1 pc. Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.

AMF

AMF800/900/1000 SGP-E: SS400 SGP-E: SS400 AMG No. Description AMF801/901 SGP-E: SS400 Filter case Cover q w AFF SS400 Replacement Parts AMl Part No. AMF800 AMF801 AMF900 AMF901 AMF1000 No. Description Material Related poroducts NBR 63271 63271 63271 3pcs. 63271 3pcs. 63271 5pcs. Element Packing e r 63148 63148 63148 3pcs. 63148 3pcs. 63148 5pcs. O.D.112 X I.D.90 X T3 5 pcs.

MHL2

18 MHW2 60 86 Open F 28 28 MRHQ 4-M12 X 1.75 through Auto switch (Thread for mounting attachment) B C D E F G H 148 206 246 J 252 336 450 Model MHL2-40D MHL2-40D1 MHL2-40D2 72 130 170 348 466 546 116 174 214 288 406 486 188 246 286 80 138 178 Notes) J dimension is at fully closed.

Parallel Style Air Gripper: Wide Type Series MHL2

(Piston rod screw) Open F 4 x M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 370 450 B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 Note 1) J dimension is at fully closed.

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L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

45

A: Orange B: Green 17.5 16 14 12.5 17 15 (Rail mounting hole pitch 12.5) Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

90

OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

6For PROFIBUS DP K e For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !4For PROFIBUS DP Terminating resistor Plug (Male) K tFor CC-Link K oFor DeviceNetTM Socket (Female) K uFor CC-Link K !2For DeviceNetTM Connects to the communication port of the communication unit connected at the end K !3 K !8 K !

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

HRX-OM-W004

This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust