3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Cross section 0.23 mm2 Indicator light P 1 3 R < >: AC Formula L1 = 16n + 10 L2 = 16n + 20 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 314 324 350 360.5 330 340 362.5 373 170 180 200 210.5 186 196 225 235.5 202 212 237.5 248 218 228 250 260.5 234 244 275 285.5 250 260 287.5 298 266 276 300 310.5 282 292 312.5 323 298 308 337.5 348 58 68

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting hole Manual override 39 36.5 44 41.5 2-5.5 mounting hole 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68

VFR

For details, refer to page 3-5-68. VF With control unit Plug-in type/Non Plug-in type Filter, regulation valve, pressure switch and air release valve are all combined to form one unit. Piping processes are eliminated. VFR Body type Plug-in type Non plug-in type Part no.

VFS

2 Non plug-in type 3-8-68 69 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS4000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (1) (2) (3)(4) Max. operating cycle (cpm) Response time (ms) Type of actuation VZ Port size C

VHK

11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 8 1 8 VHK-02S-06F VHK-02S-08F VHK-02S-10F VHK-02S-12F VHK-03S-06F VHK-03S-08F VHK-03S-10F VHK-03S-12F VHK-04S-10F VHK-04S-12F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68

AFF

Applicable compressor output (guide) Symbol Page for details P.68 X6 Symbol Description 37B 75B 37 kW 75 kW Nil With differential pressure gauge (GD40-2-01) With differential pressure switch (With indicator, 125 VAC, 30 VDC) With IN-OUT flange With differential pressure gauge (GD40-2-01) and IN-OUT flange N.C., N.O. auto drain, drain piping type White vaseline specifications P.68 X37 Thread

Air Slide Table Series MXP

only Each 0 to 5 mm on both ends MXP12 MXW Reed auto switch (2-wire, 3-wire) Solid state auto switch (2-wire, 3-wire) 2-color indication solid state auto switch (2-wire, 3-wire) Auto switch MXJ +1 0 mm Stroke length tolerance Theoretical Output MXP (N) MXY MXP16 Operating pressure (MPa) Bore size (mm) 6 8 10 12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68

Digital Flow Switch (Integrated display type)

Specifications 68 Characteristics graph 75 Analogue output 83 Dimensions 84 Made to Order 91 -1No.PF-OMM0005-N Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

End plate PPS 4 PFA body only Insert bushing 5 PFA LVN 6 PFA Nut t y PP Lever 7 TL/TIL PFA Collar 8 LQ3 Dimensions/Integral Fitting Type N G A D L 4 x M K Non-locking type Locking type 60 (H2) (H1) C B A E J B (F) Dimensions (mm) A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68

Air Slide Table Series MXW

(N) MTS Symbol Specifications Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136

Compact Slide Series MXH

4 20 20 30 68 20 4 25 78 40 30 4 30 40 78 30 4 40 50 88 6 20 20 50 60 98 25 6 25 60 108 60 30 6 30 D-X Individual -X 27 Series MXH Dimensions: 20 LT 31 20 J x M5 x 0.8 Depth 9.5 LA LB 14 3 x M6 x 1.0 through Bottom hole dia 5.1 6 x 9.3 counterbore depth 8 Plug for port (Hexagon socket head set screw) 4 x M5 x 0.8 x 4 l 4 x M5 x 0.8 Depth 11 4 x M5 x 0.8 depth 8 Guide rail width 12 2

Parallel Style Air Gripper: Wide Type Series MHL2

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30 68

α PneuAlpha HARDWARE MANUAL

at 25C (by capacitor) RTC Accuracy 5 seconds / day Operating Temperature 0 55 C Storage Temperature (-30) 70 C Dielectric withstand voltage 3750V AC > 1 min per EN60730-1 between the following points: Power/Input Terminals and Relay Output Terminals Relay Output Terminal and Relay Output Terminal All Terminals and the DIN 43880 Control box or equivalent Shock Resistance Con forms to IEC 68

IR1000/2000/3000

66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/2 Port size 2-Rc 1/8 Pressure gauge port 14-5-9 9 Series IR1000/2000/3000 Series IR1000 Relief Characteristics Pressure Characteristics Flow Characteristics Testing methods conform to JIS B 8372.

VCA

71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order

,

21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68

VHK

19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 VHKl-03S-08F VHKl-03S-10F 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-03S-12F VHKl-04S-10F 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5

ZX

Operation stop 13-2-68 68 Series ZX Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. ZX ZR Combination Symbol: J3 Combination Symbol: D2 ZM An N.C. solenoid valve is used as the supply valve. A vacuum release valve is not used. An N.C. solenoid valve is used for the vacuum release valve. An external supply valve must be provided.

Valve Single Unit

Refer to external dimensions in pages 1-6-68 to 1-6-72, and then mount it.