Compact Cylinder Series CQS

Besides, be certain that a retaining ring is placed firmly into the groove of rod cover before supplying air at the time of installment. 10 10 5 5 12 36 (37) 44 (45) 29 (31) 37 (39) 12 16 48 (47) 58 (59) 39 (39) 49 (51) 16 20 76 (79) 107 (115) 63 (68) 94 (104) 20 25 108 (113) 146 (165) 92 (98) 130 (150) 25 ( ): Denotes the values of spring extend. ( ): Denotes the values of spring extend

10

With One-touch fittings (Resin body) With One-touch fittings (Resin body) 61 mm 61 mm 68 mm 68 mm Power consumption 4.5 W (Size 1) 7 W (Size 2) 10.5 W (Size 3) (DC/N.C. valve) Bracket Standard equipment Air Air Medium vacuum Medium vacuum Manifold Solenoid coil type Valve type Material Body/PPS Base/Aluminum Seal/NBR, FKM N.C. N.O.

Low Profile Slide Table Series MXF

MXW Model Height x Width (mm) Height comparison to MXS MXJ MXF8 16 x 58 MXF12 18.5 x 68 MXF16 MXF20 21 x 80 27 x 92 MXP Neat appearance MXY Protecting stopper section with cover realizes neat appearance. Auto switch is mountable MTS Auto switch is recessed in the groove to save space.

NCM

If using other screws, the switch may be damaged. 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 5 68 68 63 Auto Switch Internal Circuit D-M9N(V) Dimensions Unit: mm DC (+) Brown D-M9 Indicator light Switch main circuit Switch main circuit Switch main circuit SMC D-M9B OUT Black M2.5 X 4 long Slotted set screw 3.2 2.7 22 DC () Blue 2.6 D-M9P(V) DC (+) Brown 6 Most sensitive position

3 Port Solenoid Valve

Lead wire length: 2000 mm V114-5LOZ-M5 SY100-68-A-20 Lead wire length: 300 mm (Standard) V114-5LPZ-M5 Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms Grommet, L and M Plug Connector With light (Z) Z N R Coil Symbol for a connector assembly with cover Caution No need to indicate the part number for a connector assembly with cover in this case.

0.

rectifier circuit. 9 Body Ported Series VQZ100/200/300 Manifold Specifications Piping specifications Applicable solenoid valve Port size Manifold base weight (g) Applicable stations Piping direction Series Base model 1(P), 3(R) 2(A) 2 stations: 83 Addition per station: 19 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) VV3QZ12-lll Rc 1/8 Top VQZ115 VQZ100 2 to 20 stations 2 stations: 68

ZQ-OM01401

70 4) () 64 66 68 [dB (A)] 1) 2) P 0.05MPa 3) 0.1MPa 4) ZQ000A 3/ (sbar) ] 0.31 C[dm VPV B 0.23 () Cv 0.09 3/ (sbar) ] 0.24 C[dm PDV B 0.26 1) () Cv 0.08 (PV)[kPa] 0 to -101.3 (PS) [MPa] 0.3 to 0.5 [MPa] (PD) [MPa] 2) 0 to 0.45 1 2 PS 0.05MPa 32 - No.ZQ-OM01401-B 9.2 9.3 / [g] ZQUA-K15L-F-00-N () 70 ZQMA-K15L-F-0 () 70 -10 N.O. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101

SMC Basic Pneumatics

Pipe with a minimum bore of 61 mm can b used. a 65 mm nominal bore pipe (see Table 4.21) has a bore ol 68 mm and would satisfy the requirements with some margin.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Modular Type Regulator Series AR

68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2

One-touch Fittings Series KQ2

42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S 48 48 67 R(PT) 1 8 1 4 KQ2W08-01S KQ2W08-02S 43.5 49.5 47 51 12 30 47 8 14 15.2 18.5 20.5 14.2 12 23 3 8 KQ2W08-03S 17 51.5 52.5 74 1 4 3 8 KQ2W10-02S KQ2W10-03S 56.5 58.5 59.5 61 66 17 10 76 18.5 21 23.8 33.5 26.5 17 1 2 KQ2W10-04S 65 66 145 68

Electro-Pneumatic Valve NVEP/NVEF Series

SOLENOID SPECIFICATIONS Adder Number 0 1 Required Amplifier VEA1 30, VEA131 vEA 250, 251 ,252 Control Range 0-750mA 0 1 A Coil Resistance 26]2 (68"F (20"C) ) 1312 (68"F (20'C)) PorYer Consumotion 15W Max. Current (68"F (20"C) ) 13W Max. Current (68"F (20'C)) Insulation Class H Max. TempeEture Rise 284'F (140"C) at Full Current Elec-trical Connection DIN Connector (h" PF) NVEF.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Dimensions (mm) Electrical entry Conduit terminal: T Grommet: G Conduit: C B C D E G H J Z A Model Q R S T N X Y VV2CS2 22 50.5 44 41.5 66 99 77 49 20 24.5 28 4.5 38 17.3 34.5 56 VV2CS3 24 60 45.5 51 68 101 86.5 57 25.5 28.5 30 5.5 42 19.3 38.5 66 VV2CS4 26 68 47.5 58.5 70 103 94 57 25.5 28.5 30 5.5 42 20.8 41.5 74 6 Direct Operated 2 Port for Steam Series VCS VCS (for steam) 2 port solenoid

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Solenoid Valve Series VQZ Manifold Specification Manifold Specification Piping specification Manifold base weight g Applicable stations Application valve Port size Piping Series Base model 1(P), 3(R) 2(A) 2 stations: 83 Addition per 1 station: 19 N1T (1/8) N3T (5/32) N7T (1/4) M5 (M5 thread) 1/8 NPTF Top VQZ115 VQZ100 2 to 20 stations VV3QZ12N3T (5/32) N7T (1/4) M5 (M5 thread) 2 stations: 68

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

1/8" 39.5 37.5 38.5 36.5 1/8" 1/4" (E,E) Port size R (NPT) 6 17 16 43.5 14 20 16 42.5 10 8 10 8 10 51 48 1/8" 55 49 46 52 1/4" (A,A): Reference dimension after installation (E,E): Reference dimension for the inserted tubing from the end surface of the nut (A),L,E: Nut material PVDF dimensions W: Width across flats dimension 22.5 21 18 25 19.5 48.5 45.5 3/8" 8 62 54 58 57.5 56 59.8 69.5 68

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) 8 31 Motor cable 68 M4 x 0.7 thread depth 8 (F.G. terminal) 53.8 8 Auto switch groove5 (1 row per side) 60 D x 150 (= E) B 6H9 (+0.030 0 ) depth 66 150 n x 6.6 76 7 7 11 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 G 70 Motor option: With lock Cable length 250 (214) 65 (3.1) 24 20 15 Motor cable Lock cable *1 When mounting the actuator using the body mounting reference plane, set

Floating Joint

68 77 99 1146 Floating Joint: Standard Type JA Series Flange Type: JAF20 to JAF160 JAF20 to 40 x Center of sphere J J R JAF50 to 160 Center of sphere x R (mm) Maximum operating tension and compression force (N) Standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa Applicable bore size (mm) Model Pitch Nominal size Center of sphere R Maximum thread depth P Allowable eccentricity U M

HRS100/150

to 45 Circulating fluid Note 2) Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55/68

Compact Manifold Regulator

Metric size Inch size IN side Straight OUT side IN side Straight OUT side Mounting position Mounting position Elbow Note) Straight Elbow Note) Elbow Note) Straight Elbow Note) Fitting type Symbol Fitting type Symbol 4 6 4 6 4 6 4 6 5/321/45/321/4 5/321/4 5/321/4 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76 77 82 83 84 Note) When the knob and the OUT piping are located on the

76

) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) Atmospheric pressure dew point F (C) How to read the dew point conversion chart Example) To obtain the atmospheric pressure dew point at a pressure dew point 50F (10C) and a pressure 102 psi (0.7 MPa). 1.