CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

Microspeed Cylinder

Actual thrust 392 392 Thrust N Thrust N Pressure converter 294 294 196 196 Pressure converter Regulator (IR2000) 98 98 Electro-pneumatic regulator (ITV) 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Rear supply pressure MPa Rear supply pressure MPa Achieves stable low speed operation even at 0.5mm/s (1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10

CJ2X/CUX/CQSX/CQ2X/CM2X

CJ2XB10-60 CQSXB20-20D Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement (mm) Speed (mm/s) Displacement (mm) Acceleration curve Acceleration curve 0 0 Operating direction IN Operating direction OUT 2.0 2.0 Operating direction IN Operating direction OUT 60 40 Displacement waveform Displacement waveform 20 20 20

Smooth Cylinder/Low Speed Cylinder

Foot bracket Flange bracket T-bracket D-X T-bracket is used with double clevis (D). 1247 Series CJ2X Basic Style (B) CJ2XB Bore size Stroke Port location on head cover Mounting nut CJ2XB10, 16 Rod end nut Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 B 0 -0.3 Port location on head cover: Axial location (R) S + Stroke Z + Stroke For details of the mounting nut, refer to page 1250.

Table of Contents

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement