HRL

ratio : 1 [kgf/L] Circulating fluid (volume) flow rate qv : 70 [L/min] Circulating fluid specific heat C : 1.0 x 103 [cal/(kgfC)] Circulating fluid outlet temperature T1 : 20 [C] Circulating fluid return temperature T2 : 24 [C] Circulating fluid temperature difference iT : 4 [C] (= T2 T1) Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W]

Series KV2 Fittings

C Tube OD (inch) MA MB Min. Flow Dia. Part Number D1 Wt.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 3) This data is considered typical but not guaranteed. 10-9 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w

Cylinder with Lock

Width across flats KA 4 x J 4 x FD GB flats B1 MM E RY BF FY d D e C B V H1 AL N RT FT BN C B 10.2 f l A K M ZZ + l + Stroke h + l FZ FX S + Stroke H ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H H1 Up to 800 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 50 16 12 12 10 51 8 Up to 1000 35

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Basic Type ZX ZR (a) Full system (b) 3 port valve selection ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ (c) Switching on the vacuum side (d) Centralized exhaust type ZF Exhaust pipe with enough capability ZP ZCU AMJ Misc.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Nil Nil Without auto switch c 20S 1 pc.

Electric Rotary Table

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) 15 Actuator side (14) (18) (Terminal

MNB

, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Intermediate strokes are available, too.

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

Mechanically Jointed Rodless Cylinders

5 C-14 6.2 x 3 x 1.6 23 4 When o and !

Thermo-dryer

(Refer to page 3.) 8 Selection of accessories Correction Factors Data Inlet Air Temperature Data Outlet Air Pressure Dew Point Data Air Flow Capacity A C E Inlet air temperature F (C) Correction factor Outlet air pressure dew point F (C) Correction factor 3.5 (100) 7.1 (200) 10.6 (300) 14.1 (400) 17.6 (500) 21.2 (600) 24.7 (700) 28.3 (800) Air flow capacity scfm (L/min [ANR]) Model IDH4 IDH6

C95

with Bolt and Safety Device Steel CA2 CS1 e Part no. b d fh11 l1 max. c min. a min.

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Basic Type/Direct Mount Type

Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1

Guide Cylinder Series MGG

, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity