CG5-S

M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17

IZT40/41/42

Bar + High-voltage power supply module + Controller IZT 40 X14 34 D 1 6H R F IZT X14 42 34 D 1 6H R F Bar IZTB X14 40 34 D 1 6H R F Standard model no. e pages 17 and 18 Bar length Type 40 411 Standard Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 42 Non-standard The bar of non-standard length is available.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Air Cylinder NCA1 Series

Male Rod End F . Female Rod End B .

NCA1

Male Rod End F . Female Rod End B .

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Shock Absorbers and Rate Controls

4 f f i .

CG5-S

M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

PFxx-OMX0002

[F 30] Setting of accumulated value hold completed : The value is stored in memory every 2 or 5 minutes.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

G Solid state M9B, M9BW, K59, K59W Nil F Male rod end Female rod end Nil S n 2 pcs. 1 pc. n pcs.

Vacuum Filter AFJ Series

Please consult with SMC separately for psi and F unit display specifications. Bowl assembly for the AFJ30 and AFJ40 models comes with a bowl guard (Material: Polycarbonate).

CE

) Black F 0V (power supply) (Shield) G Shield 3 High Precision Scale Cylinder Series CEP1 Construction 12, 20 !

Air Slide Table Series MXQ

F A F Lr 16 16 16 Lr = 120mm MXQ16-125 MXQ16-100 MXQ16-75 0.04 MXQ16-125 MXQ16-10 MXQ16-50 0.06 0.12 MXQ16-20 MXQ16-30 MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-40 MXQ16-100 MXQ16-125 Table displacement mm Table displacement mm Table displacement mm 0.03 MXQ16-50 MXQ16-50 MXQ16-40 MXQ16-100 MXQ16-30 0.04 0.08 0.02 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-20 0.02 0.04 MXQ16-10 MXQ16-10 0.01 MXQ16-10 0 0 400

3 Port Air Operated Valve Series SYJA300 1

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

REC

Stroke (cm) Mounting style Applicable max. stroke according to buckling strength 1000 900 800 700 600 500 400 REC40 Operating pressure (MPa) RE A B REC32 Mounting bracket symbol and figure Symbol REC REC25 REC 300 Load weight M (N) 25 32 40 20 REC20 200 Rod side flange style: F Head side flange style: G CX 39 50 56 61 0.3 Foot style : L L 100 30 38 43 47 0.5 W W W CY F 50 24 31 36 39 0.7

DOC1001322

A 46 400 HRS Cooling capacity 400 38kw Cooling method A Air-cooled refrigeration Piping thread type Nil Rc F G (Rc-G thread adapter set is included) N NPT (Rc-NPT thread adapter set is included) Power supply 40 3phase AC380-415V(50/60Hz) 3phase AC460-480V(60Hz) Option Nil None A Caster-adjuster foot installed D With electric conductivity control K Fluid fill port M Applicable to DI water

Booster Regulator/Air Tank

N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart Booster regulator Air tank VBA2lA VBA1lA VBA4lA VBAT05A VBAT05S VBAT10A VBAT10S VBAT20A VBAT20S VBAT38A VBAT38S P P P P P VBA42A-04 VBA43A-04 P P 1 Booster Regulator Series VBA Standard Specifications VBA10A-02 VBA20A-03 VBA40A-04 VBA22A-03 VBA42A-04 VBA11A-02 VBA43A-04 Model Fluid Compressed

Step Motor Controller

LEFS16A-400 q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.