CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

Low-Speed Rotary Actuator

IC Grommet Yes Reed circuit 100V A93V*2 A93 Relay, 2-wire 24V 12V PLC No 100V or less A90V A90 IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1m type lead wire is only applicable to D-A93.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

3-Position Rotary Table MSZ Series Size: 10, 20, 30, 50

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

1

16 20 25 c + Stroke 378.5 115 132.5 45 37.5 45 50 80 M42 x 1.5 NCA (61.1) 56.1 (27) 22 14 19 7 11 5 3.5 378.5 115 132.5 45 37.5 50 50 80 M42 x 1.5 5 to 30 h + Stroke + Adjustment (61.5) 56.5 (27) 22 14 19 7 11 5 3.5 476 140 175 55 50 60 70 110 M56 x 2 ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) D(77.5) 67.5 (36) 26 20 22.5 10 17 8 4.5 496 140 175 55 50 70 70 110 M56 x 2 5 to 50 (81

NCG/CG1

speed 50 to 400 mm/s 50 to 1000 mm/s Relief port size Auto switch can be mounted.

17

50 40 40 32 32 25 22 (10) 22 (10) 25 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 11 (5) 11 (5) 16 16 12 12 2.2 (1) 2.2 (1) 0.22 (0.1) 0.22 (0.1) 10 50 100 200 10 50 100 200 Eccentric distance L (mm) Eccentric distance L (mm) (3) 50 stroke or less, V = 400 mm/s (4) Over 50 stroke, V = 400 mm/s 220 (100) 220 (100) 100 100 110 (50) 110 (50) 80 80 63 63 50 50 22 (10) 22 (10) 40 40 11 (5)

Compact Cylinder with Lock Series CLQ

A B B RLQ 93.5 30.5 40.5 83.5 93.5 10 to 50 75, 100 Rod end nut 50 40.5 43.5 MLU Head Side flange style: CLQG50 MLGP ML1C 67 50 35 B + Stroke 9 8 4 x 6.6 76 89 A + Stroke Head Side Flange Style (mm) Stroke range Without auto switch With auto switch Bore size (mm) A A B B Rod end nut 92.5 30.5 40.5 82.5 92.5 10 to 50 75, 100 50 40.5 33.5 Double clevis style: CLQD50 7 4 x M6 x 1 Cap bolt 14

CLQ

If it is long, this may cause unlocking malfunction and reduce the lock's service life, etc. 100 100 50 50 Load weight (kg) Load weight (kg) 100 100 80 80 10 10 63 63 5 5 50 50 40 40 32 32 1 1 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 25 25 0.5 0.5 20 20 100 500 Maximum speed (mm/s) 100 500 Maximum speed (mm/s) Extension Locking, Rubber Bumper Retraction Locking, Rubber Bumper 200 200 100 100 W 50

Compact Cylinder with Lock Series CLQ

75, 100 Rod end nut 52.5 40.5 50 43.5 Front flange type: CLQF50 50 67 A + Stroke 18 9 B + Stroke 35 4-6.6 89 76 Front flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B 93.5 30.5 40.5 83.5 93.5 10 to 50 75, 100 Rod end nut 40.5 50 43.5 Rear flange type: CLQG50 50 67 4-6.6 89 76 8 9 A + Stroke B + Stroke 35 Rear flange type (mm) Stroke range Without

7

Different surfaces D-P3DWA D-P4DW D-P79WSE D-P74 24.5 50 50 50 12 D-M9 D-M9W D-M9A Caution D-A9 D-B54 50 50 75 As for the precautions on the auto switches, product specifications, refer to pages 437 to 439. Note 1) When two D-P3DWA are mounted to the cylinder with stroke 50 mm, mount them on different surfaces. Note 2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.

Table of Contents

Series CRA1 Rotary Actuator Rack & Pinion Style Size: 30, 50, 63, 80, 100 . Series Variations. Series CRA1 Rotary Actuator Rack & Pinion Style Size: 30, 50, 63, 80, 100 . How to Order . Specifications. Construction. Dimensions . Series CDRA1 Rotary Actuator with Auto Switch Rack & Pinion Style Size: 30, 50, 63, 80, 100. How to Order . Dimensions .

RSQ

w/ Onetouch fittings are 20 to 50.

Compact Cylinder with Air Cushion Series RQ

) With auto switch: 10C to 60C (No freezing) Female thread Ambient and fluid temperature Rod end thread Stroke length tolerance Mounting Piston speed +1.0 0 Through-hole 50 to 500 mm/s Standard Stroke Standard stroke (mm) Bore size (mm) 20, 25 32, 40 50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.