5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series 10-SY9000 Series 10-SY5000 Port size Flow characteristics Weight (g) Port size Flow characteristics Weight (g) 14/2(PA/B) 4/25/3(A/BEA/EB) Grommet Cv b C [dm 3/ (sbar)] Cv b C [dm 3/ (sbar)] 14/2(PA/B) 4/25/3(A/BEA/EB) Grommet Cv b C [dm 3/ (sbar)] Cv b C [dm 3/ (sbar)] Valve model Type of actuation 1, 5, 3 Valve model Type of actuation 1, 5, 3 W M8 W M8 L, M plug L, M plug (P, EA,

Table of Contents

4 +0.030 0 depth 4 C L-M6 4H9 Work piece mounting reference plane 6.5 Refer to Cross section C-C.

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

LX

4 +0.030 0 depth 4 L-M6 4H9 C Work piece mounting reference plane Refer to Cross section C-C.

•

G H G H Flat fJaI with rib 1 5 76.5 6.5 1 3.3 : ZPR40~ 40 43 18.5 i 32 ZPR20g 20 23 14 29 39.8 57.6 25 83.5 15 73.5 4 1.7 42~ 60.6 25 86.5 15 n,5 is l 3.8 I ZPR50u c 50 5:i 19S 1 33 15 73~ 4 1.8 ZPR2Sg 25 28 14.5 29 39.8 57.6 25 83~ 43~ 61.6 25 87.5 15 74 45 1 .-::.J Deep type (mm) ZPR32g 32 35 1 4.5 29.5 403 1 581 25 84 Model 'A . ~ C 0 E F ,I "MSx l 1 :M8 X1 y Model M .8 I c 0 E F "MaXI

Free Mount Cylinder

Applicable cylinder bore (mm) 10 16 20 25 32 2.4 H M4 x 0.7 d 7 B 8.1 C 6.8 D Part no.

Table of Contents

70 Reciprocating type compressor 180 70 Inlet air pressure dew point (C) Inlet air pressure (MPa) Cooling water flow (l/min) Cooling water inlet temperature (C) Outlet air temperature (C) Cooling water pressure drop (MPa) Fluid Inlet air temperature (C) 67 0.7 25 30 40 0.02 17 36 40 45 5 5 25 times heat transfer area As compared to shell and bare tube, the flower fin tube has 25 times the

4/5 Port Solenoid Valve

Flow characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot 0.9 10-SS5YJ3-21P 10-SYJ323 1/8 M3 x 0.5 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 Base mounted for internal pilot 10-SS5YJ3-32P-M5 M5 x 0.8 C4 1/

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

LX

4 +0.030 0 depth 4 L-M6 4H9 C Work piece mounting reference plane Refer to Cross section C-C.

Compact Cylinder Series CQS

Cylinder model C Mounting bolt size M3 x 25L x 30L M3 x 25L x 30L M5 x 25L x 30L M5 x 30L x 35L D 25 30 25 30 25 30 30 35 CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S 6.5 6.5 Single acting, Spring return Single acting, Spring extend CUJ 6.5 Mounting bolt Mounting bolt CU 8.5 CQS Single Acting, Spring Extend Cylinder model Mounting bolt size C D 25 30 25 30 25 30 30 35 CQ2 CQSB12

AC Servo Motor Driver

[C][0].

Free Mount Cylinder Series CU

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

MY1

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.

0.4

Note) When using the negative common specifications, use valves for negative common. 73 Plug Lead Unit Series SQ1000 Plug -in Plug Lead SQ 1000 SQ 2000 Indicator light 41.6 P=11.5 L1 L2 L3 25 27 29.9 37 5 EX510 23.9 Manual override M5: External pilot port F 9.6 (94.1) 10 B A C B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) 107.6 (3 position) 9 P 34.3 47.1

V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

10 14 20 27 25 13 6 8 17.2 20 10.5 6 5.5 12.6 7.5 4 4.5 9.2 11 15 25 20 10.5 6 6 13.3 7.5 4 4.5 9.8 22 Series C(L)KQG32/C(L)KU32 Options Dimensions Shim C(L)KQG32-X2081 C(L)KQG32-X2082 C(L)KU32-X2091 C(L)KU32-X2092 -X2321 -X2322 LOW type HIGH type LOW type HIGH type Guide pin fixing bolt ( ) Guide pin fixing bolt ( ) Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm)

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

CV/MVGQ

Type C 5 16.6 + 0.048 0 5 8 25 M5 x 0.8 6.4 12 14 RHC Double Knuckle Joint Mounting Nut Rod End Nut MK(2) Knuckle pin and set ring are shipped together.