Low-Speed Rotary Actuator

IC Grommet Yes Reed circuit 100V A93V*2 A93 Relay, 2-wire 24V 12V PLC No 100V or less A90V A90 IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1m type lead wire is only applicable to D-A93.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

1 (M) MU 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit IC circuit M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 5 V, 12 V Solid state switch Reed switch 12 V Relay, PLC Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes Relay, PLC 24 V Grommet A93

Pin Cylinders Series CJP2/CJP

W Mounting: Basic, Flange, Foot (mm) Auto switch model D-A90 D-A96 D-A9V D-M9 D-M9W D-M9V D-M9WV D-A93 Bore size W 4 6 4 6 6 4 2 4.5 10 2.5 0.5 0 1 16 2.5 0.5 0 1 Mounting: Clevis, Trunnion (mm) Auto switch model D-M9V D-M9WV D-A9 D-A9V D-M9 D-M9W DBore size W 4 -X 6 1 0 10 0 0 Individual -X 16 0 0 0 (zero) denotes the switch does not protrude from the end surface.

MY1

Separate switch spacers (BMG2-012) are required to retrofit auto switches (M9 type) on cylinders 25 to 63. 2 1 m type lead wire is only applicable to D-A93. Refer to page 1360 for details on other applicable auto switches than listed above. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649. Auto switches are shipped together (not assembled).

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Separate switch spacers (BMG2-012) are required to retrofit auto switches (M9 type) on cylinders 25 to 63. 21 m type lead wire is only applicable to D-A93. Refer to page 1360 for details on other applicable auto switches than listed above. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649. Auto switches are shipped together (not assembled).

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Mechanically Jointed Rodless Cylinders

A96 A96V 5 V IC circuit Grommet Yes A93 A90 A93V A90V IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Lead wire length symbols: 0.5 m .Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

Please consult with SMC regarding water resistant type with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Smooth Cylinder Series CQSY

IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers. Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 236 165 118 71 20 10 OUT 314 220 157 94 IN 378 264 189 113 25 12 OUT 491 344 245 147 Intermediate Strokes Method Model no.

D-F6N/D-F6P/D-F6B

Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 32mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 50mm, Body Option: CM (C+M), Auto Switch Groove: Z (Auto Switch Mounting Grooves)

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket:

Compact Rotary Actuator

setscrew (with urethane damper) as setscrew. 6-3 Auto switch set position B Port A Port Fig.12 Set screw Auto switch Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

NPT G Full stroke is 75 mm or less in the case of RZQB (through-hole type). Mounting Bracket Part No. Double clevis Note 2) Foot Note 1) Flange Bore size (mm) 32 40 50 63 RZQ-D032 RZQ-L032 RZQ-F032 RZQ-D040 RZQ-L040 RZQ-F040 RZQ-D050 RZQ-L050 RZQ-F050 RZQ-D063 RZQ-L063 RZQ-F063 Note 1) When ordering foot brackets, order two pieces per cylinder.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.