Stability of suction position,

D D D 32 32 61 50 53.5 22.61) 5 56 25.11) 7 4 4 30 (Rotating angle) 30 (Rotating angle) 83 80 103 100 D-D D-D 22 22 26 26 11 11 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF80UMJB10 105 165 444 442 459 ZP3E-YF80UMJB30 130 190 475 473 490 ZP3E-YF80UMJB50 150 210 500 498 515 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF100UMJB10 107.5 167.5 482 478 508 ZP3E-YF100UMJB30

0.4

W Note) VQC 4/5 Note) VQ2000 only VQZ D side U side Manual override Nil B C D 1 2 3 Stations 4-position dual port (N.C. +N.C.) 4-position dual port (N.O. +N.O.) 4-position dual port (N.C. +N.O.)

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

•

D-A30 type D-G3/K3 type OJ D> U> 0' Hs ; c[j A AulO switch o o c: C' iii' JJ o Q, .J!

90

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Symbol Type Pressure range [kPa] Specifications P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T 100 to 100 Analog output 1 to 5 V Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

48

L B (Table traveling distance) (4) 56 C (46.5) (C) Stroke 10.4 10.4 [D] D 28 28 (48) 35.5 [Origin] Note 3) Origin Note 2) (40) 46.5 48 43.4 (115) With lock With motor cover Motor cable (2 x 5) Lock cable (3.5) 15 Cable length 300 20 113.9 Cable length 250 20 151.3 65 20 (1.1) Motor cable (2 x 5) 54 (36.3) 46.5 [mm] Model L L A B C D E Note 1) Distance within which the table can move when

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

JXCx-OMT0001CN

0.4 0.6[Nm]) 0.4 0.6[Nm] -31No.JXC-OMT0001CN-C A B M5X14 (2) () M3 -32No.JXC-OMT0001CN-C (1)D (100) (2)2mm 2 D (3) 40 50mm ()100mm 100 -33No.JXC-OMT0001CN-C 5.

Air Slide Table

GR-S-010 (10 g) GR-S-020 (20 g) Guide unit GR-L-005 (5 g) GR-L-010 (10 g) Cylinder unit High carbon chrome bearing steel Stainless steel NBR NBR NBR 25 Series MXQR Auto Switch Proper Mounting Position (Detection at Stroke End) Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E A Model 10 20 30 125 75 100 40 50 150 10 20 30 125 75 100 40 50 150 MXQR6 17.5

JXCx-OMU0026

0.0 0.0 0.5 Axis 2 CIR-L 40.00 100 0.0 0.0 0.5 2 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-R 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 0.00 100 0.0 0.0 0.5 3 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-3 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-3 -40.00 100 0.0 0.0 0.5 4 Axis 3 -20.00 100 0.0 0.0 0.5 Axis 4 -20.00 100 0.0 0.0 0.5

5 Port Solenoid Valve

B [Pressure center] D side U side Function C 4-position dual 3-port (N.C. + N.O.)

Cylinder with Turntable Series MGT

b d Proper Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV Auto switch model D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Proper Mounting Position (mm) A B A 15 19.5 24.5 B A 14 18.5 23.5 B Bore size 63 80 100 a b 14 18 17 c 20 24 23 d Auto switch model 15 18 22.5 19 23.5 28.5 11 14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming the operating

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Guide Cylinder Series MGG

H C D HR HN (Max.)

Electric Actuator

C x 200 (=D) 20 Note 1) Distance within which the table can move when it returns to origin.

LEY-OM007

90.00 0.50 No.00[mm] 100[mm] 1AREA 100[mm]-0.5[mm]=99.5[mm] INPON [mm] c 100 0 [mm/s] b INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2AREA AREA1 2 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] [mm] c 2[mm] j 1[mm] j 100 0 [mm/s] b ON AREA OFF INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2 -25- -IN INPAREA a b c d e f

VQZ1000/2000/3000

Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) Black (DC) Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Indicator light For with Light/Surge Voltage Suppressor Circuit for DC Circuit for AC Indicator light A () A [+] SOL SOL C (+) C ZNR Indicator light [] Due to the use of non-polar light, the series