VZ3000

H VK VZ (Mounting hole pitch) (Mounting hole) Manual override (Non-locking) VF VFR VP4 (Mounting hole pitch) G: 300 mm H: 600 mm (Lead wire length) VZS VFS VS4 VQ7 EVS (PE port) VFN (Piping port) L plug connector (L) VZ3240-L-01 M plug connector (M) VZ3240-M-01 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3240-D-01 Built-in speed controllers

Slider Type Ball Screw Drive/11-LEFS Series

mm) LEF LEF Model q C side traveling parallelism to A side w D side traveling parallelism to B side q LEJ LEFS25 0.05 0.03 C side w LEL LEFS32 0.05 0.03 D side LEFS40 0.05 0.03 LEM Note) Traveling parallelism does not include the mounting surface accuracy.

4/5 Port Air Operated Valve Series SYJA3000

L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 94.4 86.9 61.6 [68.6] M8 x 1 66.1 75.6 0.6 0.6 46.2 48.6 0.6 105.2 0.6 0.6 0.6 74.5 [76.7] 64.7 [66.9] 84.5 83.6 107 [111.4] 73.6 87.4 [91.8] 103.4 [107.8] 66.2 123 [127.4] 125.2 90.4 127 106.4 Max. 10 141.2 121.2 143 72.7 [79.7] Approx. 300 (Lead wire length) Pg7 Approx. 300 (Lead wire length) Applicable code O.D

CJ2X/CUX/CQSX/CQ2X/CM2X

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

MXW

D-A9V 10 6 6 8.5 10 D-M9 D-F9W D-M9V D-F9WV 5.5 (4) 3 (2) 3 (3) 4 (3) 6 (4) Interference Note) Figures in parentheses are the case for D-M9, D-M9V switch types.

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-A44 D-A44C Setting Position of Auto Switch (mm) Mounting Height of Auto Switch (mm) D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5, B6 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F D-A5,A6 D-A3,A3C D-B5,B6 D-G5W D-K59W D-G5BAL D-G59F Model D-F5W D-J59W D-F5BAL D-F59F D-A3C D-G39C D-K39C D-A44C D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A44,A44C D-A59W

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

CS1

D-A5/A6, D-A59W Tie rod mounting D-G3/K3 Band mounting Solid state swich D-F5/J5, D-F5NT, D-F5W/J59W, D-F5BA, D-F5F Tie rod mounting 1.10-1 Air Cylinder/Standard Series CS1 Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 JR Rod boot/Cushion Rod boot Mounting J K N R H Nylon tarpaulin Heat resistant tarpaulin No cushion With cushion on

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band Band

e

400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3 2 2 2 1 1 100

VZ5000

Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector G: Lead wire length 300 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm Light/Surge voltage suppressor Nil None Z With light/surge voltage

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

Electric Actuator / Low profile slider type

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF -21- Step No. 1: Positioning operation a b c d e f g h i j k [ ] Need to be set [] Need to be adjusted as required. [ ] Not used.

Air Slide Table Series MXW

65 80 690 7 163 134 1 MXW25-300 232 395 245 320 60 52 60 740 8 188 159 2 165 Series MXW Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90 (V), D-A93 (V), D-A96 (V) Stroke (mm) Model 300 250 275 50 75 100 200 225 25 125 150 175 A 31.5 27.5 27.5 52.5 27.5 27.5 B 100.5 125.5 150.5 79.5 175.5 200.5 B A MXW8 W 11.5 7.5 7.5 32.5 7.5 7.5 V 120.5 145.5 170.5

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

MU

3 contained in one kit, and can be ordered using the kit number for each cylinder bore size. 2.4-7 Series MUW Basic: MUWB Rod end male thread (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27

Thermo-chiller/Rack Mount Type

Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating

Large Size Vacuum Module: Series ZR

for vacuum (ZSE2) + Filter Filter Caution ZL D Lead wire specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) E F 1.