High Purity Chemical Valve Single type Suck back P P P TL/TIL A B A B Unit Single type Unit LQ3 Manifold (5 stations max.) A R P 3 port N.C. PA N.C.
40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg
. 828 P . 831 P . 834 P . 837 P . 840 P . 846 Air General fluids Fluid Rated pressure range (Minimum display) Basic Specifications Functions Options Repeatability % (F.S.) 0.2 0.1 1 0.2 0.3 12 to 24 VDC Voltage No. of outputs for a switch 5 2 1 to 5 V 1 to 5 V 4 to 20 mA 1 to 5 V 4 to 20 mA Analog output Operating temperature C 0 to 50 0 to 50 10 to 60 1-color 2-color Digital display Front
38 50 Note) Refer to "Dimensions" of MXS8 on P.56 for one with shock absorber as symmetric.
0/.000 P[r2050(n(s] 12.06 751 +.010/.000 .t 51 +.010/.000 t.250 + . 0 0 0 / . 0 1 0 l_50 .630 +.020/.0002.88 1.50 t.50 t_40 t.06 N/A .90 8.2 P 2 | 00(ttt5l 16.06 .t 5l +.010,/.000 t.250 +.000/.010 1.50 .630 +.020/.0002.88 1.50 1.50 1.40 t.06 .90 t.3 PM2t 50qil(S) 21.13 t51 +.010/..000 .7 5l + 010/000 i.250 +.0001-.010 t.50 .630 +.020/..000 2.88 t.50 t_50 t.40 1.06 r.r/A .90 11.1 8.3?
for 40 and 50, and 50% for 63, 80 and 100.)
(50) P AE E (Rc) K L-type block R Q Weight (kg)* d K W Y AE (mm) (75) (50) W J Port size (mm) W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 62 62 62 65 65 65 65 65 9 9 9 9 9 9 9 9 70 70 70 85 85 85 105 105 47 47 47 50 50 50 50 50 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 Weight (kg)* E J P Q Weight (kg)* E 69 69 74
External Connections (P.22)", "6.Details of Power supply plug (P.24)".
P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P
With Auto Switch Without rod boot With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l P S N RR T U V W Z ZZ f h Z1 ZZ1 S e MA MB MM Z 383 ZZ 412 Z1 406 ZZ1 435 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 29 32 36 44 44 55 5 5 5 35 40 45 50 50 65 98 30 30 30 383 412 40 40 40 45 45
B Counter bore depth C T T Y HT HP P (Piping port) (Operating direction: A) L 0 -0.1 22 8 Note 1) TC X F 14 WP 19.5 12.5 D 30 13 WS GP GW 4 x LD PW QW Plug 12.5 P (Piping port) (Operating direction: B) 2 x 4 x MM Thread depth M Switch rail HR HS CR W K Plug G G Z + Stroke Q + Stroke CY3RG15 P (Piping port) (Operating direction: B) CY3RG25, 32, 40, 50, 63 Note 1) 50, 63: L 0 0.2 CY3RG10 B
It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.
Compact Manifold Regulator ARM10/11 Series ARJ Manifold Type Single Unit Type AR425 to 935 Common supply Individual supply Standard Front knob ARX AMR ARM ARM ARP P.740 P.739 IR-A Example of panel mounting P.726 P.716 IR IRV Front knob type is newly added to the single unit specifications. VEX Allows high degree of freedom in selection according to the installation conditions.
to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head side flange style, Center
S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25
S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25
, 50, 63, 80 and 100.) 13 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !
to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head side flange style, Center
P Signals and terminal status can be monitored. P Parameters can be set.
P(2) P(1) P(1) Note 1) P P P P P P P P P P P P P P P P P P P P P P P P P Note 5) P Basic Foot Rod flange Head flange Integral clevis Single clevis Double clevis Note 3) Note 1) Note 1) P(1) Note 2) P(1) Note 2) P(1) P(1) P(1) Rod trunnion Head trunnion Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Note 1) Mounting nuts are not attached to the integral clevis, single clevis and