Cylinder with Lock Series CLS

< 0.4 MPa 0.3 MPa P < 0.4 MPa 4000 1000 900 3000 250 800 250 700 2000 600 200 200 CLJ2 500 180 Load mass: m (kg) Load mass: m (kg) 180 1000 160 700 800 900 400 CLM2 140 160 600 125 300 CLG1 500 140 400 CL1 125 300 200 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph 6 Graph 3 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa

90

P Supply valve: Self-holding type (R type) Release valve: N.C.

Compact Manifold Regulator Series ARM5

ITV IC SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC SMC SMC SMC SMC MADE IN JAPAN PVQ K K K P P P C C C U U U K K K P P P O O O S S S C C C L L L H H H U U U O O O S S S L L L H H H VEF VEP Front handle/Bottom ported Front handle/Top ported Mixed manifold Mixed manifold Types and sizes of the One-touch fittings can be changed.

Floating Joint

Type: JAF JAF180 200--X530 4 x J Center of sphere M U U D 60 G P T B C H R A Dimensions (mm) Maximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D T J G H Weight (kg) Nominal size Pitch 180 JAF180-40-150-X530 40 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.1 200 JAF200-45-150-X530 45

3 Port Solenoid Valve Series VQ100 1

39 32.4 10.8 3.5 P , E port E P 8.9 E P 11 2-3.5 Mounting hole 26.5 27.2 34 V100 (Lead wire length) 300 (Lead wire length) SY P = 1011.5 300 300 (Lead wire length) 43.3 37.2 12.5 7.5 43.3 SYJ U side D side 1 2 3 4 5 n (Lead wire length) VK For latching and AC VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

3 Port Solenoid Valve Series VQ100

39 32.4 10.8 3.5 P , E port E P 8.9 E P 11 2-3.5 Mounting hole 26.5 27.2 34 V100 (Lead wire length) 300 (Lead wire length) SY P = 1011.5 300 300 (Lead wire length) 43.3 37.2 12.5 7.5 43.3 SYJ U side D side 1 2 3 4 5 n (Lead wire length) VK For latching and AC VZ VT VP Type M W 35.1 32.4 Type L H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 VG Latching type 100 VAC or more 16.4 A A VP n-M5 A port Formula

3 Port Solenoid Valve Series VQ100 1

39 32.4 10.8 3.5 P , E port E P 8.9 E P 11 2-3.5 Mounting hole 26.5 27.2 34 V100 (Lead wire length) 300 (Lead wire length) SY P = 1011.5 300 300 (Lead wire length) 43.3 37.2 12.5 7.5 43.3 SYJ U side D side 1 2 3 4 5 n (Lead wire length) VK For latching and AC VZ VT VP Type M W 35.1 32.4 Type L H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 VG Latching type 100 VAC or more 16.4 A A VP n-M5 A port Formula

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min. B Nonadsorption ON Switch output 1(2) OFF Work 1 Work 2 Work n Atmosphere ZSE ISE Switch output response time when autoshift is input.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Fieldbus System

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

0 400 400 DLateral load F [N] 300 300 -X 200 200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

CQS

Refer to p.0-39 through 0-46 for Safety Instructions and common precautions.

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Secure the adjusting bolt at the position where it protrudes approximately 0.5 mm from the shock absorber. 25 Horizontal collision: P = 0.5 MPa 50 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit L unit 1000 1000 Air cushion Air cushion 500 400 300 500 400 300 Adjusting bolt 200 200 1002 3 5 10 20 50 100 1 2 3 4 5 10 20 30 0.5 40 50

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect