High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Air Cylinder Series MB

model D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-A3 D-A44 D-G39 D-K39 D-A9 D-A9V D-A5 D-A6 D-A59W D-F5NTL D-P4DWL CJ1 CJP Bore size A A A A B A B B B B B B B B A A A A CJ2 32 40 50 63 80 100 125 6.5 4 10.5 8 0.5 0 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 10.5 8 0.5 0 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 CM2 7 4.5 11 8.5 1 0 5 2.5 7.5 5 12.5 10 1 0 4.5

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

C 11 13 15 18 21 24 32 E 0.5 5.5 MA 2 x A screw depth B 5.4 M2 x 0.4 0.6 (B) 5.2 D0.8 C 1 M3 x 0.5 8 D (E) F-F 551 Parallel Style Air Gripper/3-Finger Type Series MHS3 16, 20, 25, 32, 40, 50, 63, 80, 100, 125 How to Order Bore size 16 to 25 M9BW 20 MHS3 D 3 fingers Number of fingers 3 Number of auto switches Nil S 2 pcs. 1 pc.

Made to Order

Double clevis type Lock location Port (A) (A) (A) (A) (A) (A) (A) (B) (D) (B) (D) (B) (B) (D) (D) (B) (B) (B) (D) (D) (D) CLS (C) (C) (C) (C) (C) (C) (C) Cushion valve 1.

5

D-K39 D-K39C D-A5m D-A6m D-A3m D-A3mC D-A44 D-A44C Auto switch model D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-B5m D-B64 D-A9m D-A9mV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 50 9.5 8.5 5.5 4.5

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Rotary Table/Rack & Pinion Style Series MSQ

Nil S n Reed switch Auto switch A90 Solid state switch M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision style B Basic style 2 pcs. 1 pc. n pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Next, B is entered to find A the inertial moment for the rotation of shaft (A) as 5 b a A = ( ) 2 B Number of teeth = b Kinetic Energy/Rotation Time Even in cases where the torque required for rotation of the load is small, damage to internal parts may result from the inertial force of the load.

Auto Switch Guide

Be careful not to exchange the power cable (brown) with the output cable (black). 10-20-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

Cylinder with Turntable Series MGT

Auto switch a c b d Proper Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV Auto switch model D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Proper Mounting Position (mm) A B A 15 19.5 24.5 B A 14 18.5 23.5 B Bore size 63 80 100 a b 14 18 17 c 20 24 23 d Auto switch model 15 18 22.5 19 23.5 28.5 11 14 18.5 10 13 17.5 D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming

2–4

B dimension: 108 mm.

Air Cylinder Series CA2

A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 4 1 0.5 0.5 1 7 2.5 4.5 12 10 0 0 4 0 1.5 9 8 3.5 6 4 3.5 1.5 1 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 3 8.5 7.5 6 5 4.5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 5.5 12 10 9.5 7.5 7 6 6.5 12.5 8 10 17.5 16 4 4.5 10.5 6 8 15.5 14 9 13.5 12.5 11 10 9.5 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 10.5 Note) Adjust the auto

Magnetically Coupled Rodless Cylinder

B 4 x Counterbore depth.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

NCQ8

for Stroke End Detection In-line D-A9 D-M9 D-M9W Perpendicular D-A9V D-M9V D-M9WV 056 B A B A HS HS B A B A 075, 106 HS B A B A 150, 200, 250, 300, 400 Note) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Rotary Clamp Cylinders

Auto Switch Proper Mounting Position Applicable Cylinders: MK2 Series D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-A72/A7H D-A80H/A73C D-A80C/F7/F79F D-J79/F7V/J79C D-F7BA/F7W D-J79W/F7WV A Auto switch model D-A79W D-F7NTL D-A9 D-A9V D-A73 D-A80 D-P4DWL B B A A B A B A B B B A A Bore size 12 7 34 29 4 26 8 4 6.5 30 26 28.5 20 14 9 34.5 30 6 27 10 6 8.5 31 27 29.5 25 15.5 10.5 38 33.5 7.5